Low area contact phase-change memory
View Patent ↗A memory device includes a first electrode and a second electrode. A phase-change material is disposed between the first and second electrodes. The phase-change material is in electrical communication with the first and second electrodes at a first contact region and a second contact region respectively. The first and second contact regions are similar in contact area. The device enables scaling of reset current to smaller dimensions without encountering a limitation imposed by an offset current.
1. A memory device comprising:
a first electrode and a second electrode;
a phase-change material disposed between said first and second electrodes, said phase-change material being in electrical communication with said first and second electrodes over a first contact region and a second contact region, respectively;
a first insulator and a second insulator disposed on opposite sides of said phase-change material, wherein said first electrode protrudes through a first aperture in a first insulator, and said second electrode protrudes through a second aperture in a second insulator, and wherein said phase change material is a layer entirely spacedly separating said first insulator and said second insulator; and
wherein the area of said first contact region is about 100% to about 200% of the area of said second contact region.
2. The memory device of claim 1 , wherein the area of said first contact region is about 100% to about 150% of the area of said second contact region.
3. The memory device of claim 1 , wherein the area of said first contact region is about 100% to about 110% of the area of said second contact region.
4. The memory device of claim 1 , wherein said first and second contact regions are generally circular.
5. The memory device of claim 4 , wherein said first and second contact regions have a diameter of about four hundred (400) Angstroms to one thousand five hundred (1500) Angstroms.
6. The memory device of claim 4 , wherein said first and second contact regions have a diameter of about four hundred (400) Angstroms to one thousand (1000) Angstroms.
7. The memory device of claim 1 , wherein the shape of said first contact region differs from the shape of said second contact region.
8. The memory device of claim 7 , wherein said first contact region is round.
9. The memory device of claim 1 , wherein said phase-change material includes a programmed volume, said programmed volume having a generally cylindrical shape.
10. The memory device of claim 9 , wherein said programmed volume contacts said first electrode and said second electrode.
11. The memory device of claim 1 , wherein passage of current from said first electrode to said second electrode forms a programmed volume within said phase-change material, said programmed volume having a tapered shape, said tapered shape narrowing in the direction of said current.
12. The memory device of claim 1 , wherein said phase-change material includes one or more elements selected from the group consisting of Te, Se, Ge, Sb, Bi, Pb, Sn, As, S, Si, P, O and mixtures or alloys thereof.
13. The memory device of claim 1 , wherein said first contact region and said second contact region are not vertically aligned.
14. A memory device comprising:
a first insulator having a first hole therethrough and a first spacer around the inner periphery of said first hole, said spacer having a first sublithographic hole therethrough;
a second insulator having a second hole therethrough and a second spacer around the inner periphery of said second hole, said second spacer having a second sublithographic hole therethrough;
a phase-change material entirely spacedly separating said first and second insulators;
a first electrode formed through said first sublithographic hole and through said first insulator and being in electrical communication with said phase-change material at a first contact region;
a second electrode formed through said second sublithographic hole and through said second insulator and being in electrical communication with said phase-change material at a second contact region; and
wherein the area of said first contact region is about 100% to about 200% of the area of said second contact region.
15. The memory device of claim 14 , wherein said first and second holes are sized to a lithographic process dimension.
16. The memory device of claim 14 , wherein said first spacer and said second spacer comprise an insulator material.
17. The memory device of claim 14 , wherein said first and second contact regions have a diameter of about two hundred (200) Angstroms to one thousand (1000) Angstroms.
18. The memory device of claim 14 , wherein said first and second contact regions have a diameter of about two hundred (200) Angstroms to eight hundred (800) Angstroms.
19. The memory device of claim 14 , wherein said phase-change material includes one or more elements selected from the group consisting of Te, Se, Ge, Sb, Bi, Pb, Sn, As, S, Si, P, O and mixtures or alloys thereof.
20. The memory device of claim 14 , wherein the area of said first contact region is about 100% to about 150% of the area of said second contact region.
21. The memory device of claim 14 , wherein the area of said first contact region is about 100% to about 110% of the area of said second contact region.
22. The memory device of claim 1 , wherein said first aperture and said second aperture have substantially cylindrical walls therethrough.