Piezoelectric substance and piezoelectric element
A piezoelectric substance has a substrate, an electrode formed on the substrate, and a piezoelectric film formed on the electrode. The piezoelectric film is formed of crystals having a main phase of (Na x K y Li z )NbO 3 (0<x<1, 0<y<1, 0≦z≦0.1, x+y+z=1). The piezoelectric film is a polycrystalline thin film preferentially oriented to either or both of <001> and <110> crystalline axes in the direction normal to the substrate surface, and the axes of its crystals oriented to each crystalline axis are also formed in the same direction in the in-plane direction of the substrate.
1. A piezoelectric substance, comprising:
a substrate;
an electrode formed on the substrate; and
a piezoelectric film formed on the electrode,
wherein the piezoelectric film comprises crystals having a main phase of (Na x K y Li z )NbO 3 (0<x<1, 0<y<1, 0≦z≦0.1, x+y+z=1), and is a polycrystalline thin film oriented to either or both of <001> and <110> crystalline axes in the direction normal to the substrate surface, and the axes of its crystals oriented to each crystalline axis are also formed in the same direction in the in-plane direction of the substrate.
2. The piezoelectric substance according to claim 1 , wherein:
the substrate comprises Si or MgO, and the electrode comprises Pt or a stacking structure including Pt.
3. A piezoelectric element, comprising:
the piezoelectric substance as defined in claim 1 ; and
an additional electrode provided on the piezoelectric substance.
4. A piezoelectric element, comprising:
the piezoelectric substance as defined in claim 2 ; and
an additional electrode provided on the piezoelectric substance.