IP Library Granted Patent US 7,828,896
Granted Patent B2
US 7,828,896 · App. 11/878,125 · Granted Nov 9, 2010

Methods of growing a group III nitride crystal

Assignee: Ricoh Company, Ltd.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,828,896
App. No.
11/878,125
Granted
Nov 9, 2010
Kind
B2
Abstract

A method of growing a group III nitride crystal grows a group III nitride crystal from a solution in which an alkaline metal, a group III metal and nitrogen are dissolved, and includes, in the solution, a material which increases solubility of the nitrogen into the solution.

Claims (27)

1. A method of growing a group III nitride crystal, comprising:

dissolving a group III nitride into a solution including an alkaline metal;

recrystallizing the group III nitride into the group III nitride crystal at a location different from a location where the group III nitride is dissolved within the solution; and

independently controlling a temperature at the location where the group III nitride crystal is recrystallized and a temperature at the location where the group III nitride is dissolved within the solution, such that the locations have mutually different temperatures at all times during the dissolving and recrystallizing.

2. The method as claimed in claim 1 , wherein the solution contacts nitrogen gas.

3. The method as claimed in claim 1 , wherein the group III nitride dissolved into the solution comprises plate-shaped crystals.

4. The method as claimed in claim 1 , wherein the group III nitride dissolved into the solution comprises an approximately stoichiometry composition.

5. The method as claimed in claim 1 , wherein the group III nitride dissolved into the solution comprises group III nitride crystals which are grown from a solution in which an alkaline metal, a group III metal and nitrogen are dissolved.

6. The method as claimed in claim 1 , wherein the group III nitride crystal is grown on a seed crystal.

7. A method of growing a group III nitride crystal, comprising:

forming, within a reaction chamber, a molten mixture of an alkaline metal and a material which includes a group III metal;

growing a group III nitride crystal which is made of the group III metal and nitrogen, from the molten mixture and a material which includes the nitrogen; and

independently controlling a temperature in a vicinity of a surface of the molten mixture and a temperature of a crystal growing region within the molten mixture, so that the nitrogen dissolves into the molten mixture from the surface and the group III nitride crystal grows in the crystal growing region, wherein the crystal growing region is other than the surface.

8. The method as claimed in claim 7 , comprising:

filling a space within the reaction chamber with the material which includes the nitrogen, the material which includes the nitrogen being in a gaseous state; and

controlling a pressure within the reaction chamber so that a partial pressure of the material which includes the nitrogen and is in the gaseous state generates no nucleus of the group III nitride in the vicinity of the surface in response to a temperature change at the surface.

9. The method as claimed in claim 7 , wherein the temperature in the vicinity of the surface is controlled to a temperature which is higher than the temperature of the crystal growing region.

10. The method as claimed in claim 9 , comprising:

setting a seed crystal in the crystal growing region; and

controlling the temperature and a pressure in the crystal growing region, so that the group III nitride crystal grows on the seed crystal.

11. The method as claimed in claim 9 , comprising:

controlling the temperature and a pressure in the crystal growing region, so that a columnar group III nitride crystal grows in the crystal growing region.

12. The method as claimed in claim 9 , comprising:

controlling the temperature and a pressure in the crystal growing region, so that a plate-shaped group III nitride crystal grows in the crystal growing region.

13. The method as claimed in claim 9 , wherein the crystal growing region is located in a lower portion of the reaction chamber.

14. The method as claimed in claim 7 , wherein the temperature in the vicinity of the surface and the temperature of the crystal growing region are controlled to approximately same temperature.

15. The method as claimed in claim 7 , wherein the temperature in the vicinity of the surface is controlled to a temperature which is lower than a temperature at a lower portion of the molten mixture within the reaction chamber.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 18, 2020
From: SCIOCS COMPANY LIMITED
To: SUMITOMO CHEMICAL COMPANY, LIMITED
Reel/Frame 053526/0021 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 21, 2019
From: RICOH COMPANY, LTD.
To: SCIOCS COMPANY LIMITED
Reel/Frame 048391/0473 →
Priority Claims (6)
JP 2003-019716 · Jan 29, 2003 · national
JP 2003-071302 · Mar 17, 2003 · national
JP 2003-081836 · Mar 25, 2003 · national
JP 2004-011536 · Jan 20, 2004 · national
JP 2004-012906 · Jan 21, 2004 · national
JP 2004-013562 · Jan 21, 2004 · national
Continuity (2)
Division 1076550200 · Jan 28, 2004
Related Publication 20070266928A1 · Nov 22, 2007