Semiconductor laser diode having wafer-bonded structure and method of fabricating the same
View Patent ↗Example embodiments are directed to a semiconductor laser diode and a method of fabricating the same. The semiconductor laser diode may include a first semiconductor layer formed over a first substrate and capable of emitting light, and a second semiconductor layer capable of guiding the emitted light, wherein the first and second semiconductor layers are bonded to each other. The method of fabricating the semiconductor laser diode may include forming over a first substrate a first semiconductor layer capable of emitting light, forming over a second substrate a second semiconductor layer capable of guiding the light, bonding the first semiconductor layer to the second semiconductor layer, and removing the second substrate. The second semiconductor layer may be grown separately under conditions different from those for forming the first semiconductor layer, and may be subsequently bonded to the first semiconductor layer.
1. A semiconductor laser diode, comprising:
a first semiconductor layer formed over a first substrate and emitting light; and
a second semiconductor layer guiding the emitted light
wherein the first and second semiconductor layers are bonded to each other, and
wherein the first semiconductor layer includes a first clad layer, a first waveguide layer, an active layer, a second waveguide layer, and a first bonding layer being formed over the first substrate in sequential order, and the second semiconductor layer includes a second bonding layer bonded to the first bonding layer and a second clad layer formed over the second bonding layer.
2. The semiconductor laser diode of claim 1 , wherein the second semiconductor layer has one of a ridge waveguide structure or a gain guide structure.
3. The semiconductor laser diode of claim 1 , wherein the second semiconductor layer further comprises a current shield layer interposed between the second bonding layer and the second clad layer.
4. The semiconductor laser diode of claim 1 , wherein the first and second semiconductor layers include one selected from a group consisting of GaN-based III-V nitride semiconductors.
5. The semiconductor laser diode of claim 4 , wherein the first semiconductor layer is formed in a structure including an n-AlGaN/GaN contact layer, an n-GaN clad layer, an n-GaN waveguide layer, an InGaN active layer, and a p-GaN waveguide layer being between the first substrate and the first bonding layer, and the second semiconductor layer is formed in a structure including the second bonding layer a p-AlGaN/GaN clad layer and a p-InGaN contact layer formed in sequential order, and
wherein the first bonding layer is formed of a p-InGaN and the second bonding layer is formed of a p-InGaN.
6. The semiconductor laser diode of claim 1 , wherein the first substrate includes one selected from a group consisting of sapphire, GaN, SiC, GaAs, and InP.
7. The semiconductor laser diode of claim 6 , wherein the first semiconductor layer further comprises a first base layer laterally grown from an ELO (epitaxial lateral overgrowth) or PENDEO seed pattern formed on the first substrate.
8. The semiconductor laser diode of claim 7 , wherein the first base layer includes one selected from a group consisting of GaN, Al x Ga 1-x N, where 0<x≦1, and In y Al x Ga 1-y-x N, where 0<x≦1 and 0<y≦1.