Semiconductor integrated circuit device
View Patent ↗Interconnections are formed over an interlayer insulating film which covers MISFETQ 1 formed on the principal surface of a semiconductor substrate, while dummy interconnections are disposed in a region spaced from such interconnections. Dummy interconnections are disposed also in a scribing area. Dummy interconnections are not formed at the peripheries of a bonding pad and a marker. In addition, a gate electrode of a MISFET and a dummy gate interconnection formed of the same layer are disposed. Furthermore, dummy regions are disposed in a shallow trench element-isolation region. After such dummy members are disposed, an insulating film is planarized by the CMP method.
1. A method of manufacturing a semiconductor integrated circuit device, comprising steps of:
forming first interconnections and first dummy interconnections comprised of the same layer as said first interconnections over a principal surface of a semiconductor substrate;
forming a first insulating film over said first interconnections and first dummy interconnections;
forming a second insulating film over said first insulating film;
planarizing said second insulating film by polishing;
forming a third insulating film over said second insulating film; and
forming second interconnections, second dummy interconnections and markers for lithography, said second dummy interconnections and said marks being comprised of the same layer as said second interconnections, over said third insulating film such that said markers are arranged over said first dummy interconnections and such that said second dummy interconnections comprised of the same layer as said markers are not disposed in a vicinity of said markers.
2. A method of manufacturing a semiconductor integrated circuit device according to claim 1 , wherein said second insulating film includes a film formed by using a high-density plasma chemical vapor deposition method.
3. A method of manufacturing a semiconductor integrated circuit device according to claim 1 , wherein said second insulating film includes a film comprised of a Spin on Glass film.
4. A method of manufacturing a semiconductor integrated circuit device according to claim 1 , wherein said first interconnections serve as gate electrodes of field effect transistors.
5. A method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein said second interconnections are comprised of an uppermost interconnection layer.
6. A method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein the second dummy interconnections comprised of the same layer as said second interconnections are formed over said third insulating film except in the vicinity of said markers.
7. A method of manufacturing a semiconductor integrated circuit device according to claim 6 , wherein said second dummy interconnections are not formed within 60 μm of said markers.
8. A method of manufacturing a semiconductor integrated circuit device according to claim 1 , further comprising the step of:
detecting said markers for alignment.
9. A method of manufacturing a semiconductor integrated circuit device, comprising steps of:
(a) forming first interconnections and first dummy interconnections comprised of the same layer as the first interconnections on a principal surface of a semiconductor substrate;
(b) forming a first interlayer insulating film over the first interconnections and first dummy interconnections;
(c) planarizing the first interlayer insulating film by polishing; and
(d) after the step (c), forming second interconnects, second dummy interconnections and markers for lithography, the second dummy interconnections, and markers being comprised of the same layer as the second interconnections, on the first insulating film such that the markers are arranged over the first dummy interconnections and such that the second dummy interconnections comprised of the same layer as the markers are not disposed in the vicinity of the markers.
10. A method of manufacturing a semiconductor integrated circuit device according to claim 9 , wherein the first interlayer insulating film includes a film formed by using a high-density plasma chemical vapor deposition method.
11. A method of manufacturing a semiconductor integrated circuit device according to claim 9 , wherein the first interlayer insulating film includes a film comprised of a Spin on Glass film.
12. A method of manufacturing a semiconductor integrated circuit device according to claim 9 , wherein the first interconnections serve as gate electrodes of field effect transistors.
13. A method of manufacturing a semiconductor integrated circuit device according to claim 9 ,
wherein the second interconnects are comprised of a uppermost interconnection layer.
14. A method of manufacturing a semiconductor integrated circuit device according to claim 9 , wherein the second dummy interconnections are not formed within 60 μm of the marks.
15. A method of manufacturing a semiconductor integrated circuit device according to claim 9 , further comprising the step of:
detecting the makers for alignment.