Cerium oxide-based abrasive, and production method and use thereof
View Patent ↗The present invention provides a cerium oxide-based abrasive ensuring high removal rate, less generation of scratches, high-precision polished surface with small surface roughness, and a safe, simple and low-cost production process. Further, the present invention provides a method for producing such an abrasive. The method of the present invention comprises (a) adding a precipitant to an aqueous cerium-containing light rare-earth salt solution to precipitate a light rare-earth salt, thereby obtaining a first slurry containing a light rare-earth salt particle; (b) adding a fluorinating agent to a slurry containing a light rare-earth salt particle to react the light rare-earth salt with the fluorinating agent, thereby obtaining a second slurry containing a light rare-earth fluoride particle; (c) mixing the first slurry and the second slurry to obtain a mixed slurry; and (d) drying and firing the mixed slurry, and a cerium oxide-based abrasive obtained by this method. The abrasive of the present invention is produced by the method of the present invention.
1. A method for producing a cerium oxide-based abrasive, comprising:
(a) adding a precipitant to an aqueous cerium-containing light rare-earth salt solution to precipitate a light rare-earth salt, thereby obtaining a first slurry containing a light rare-earth salt particle having an average particle diameter of 0.1 to 3 μm;
(b) adding a fluorinating agent to a slurry containing a light rare-earth salt particle having an average particle diameter of 0.1 to 3 μm to react the light rare-earth salt with the fluorinating agent, thereby obtaining a second slurry containing a light rare-earth fluoride particle having an average particle diameter of 0.1 to 3 μm;
(c) mixing said first slurry and said second slurry to obtain a mixed slurry; and
(d) drying and firing said mixed slurry.
2. The method for producing a cerium oxide-based abrasive according to claim 1 , wherein in the step (b), a part of said first slurry is used as said slurry containing a light rare-earth salt particle.
3. The method for producing a cerium oxide-based abrasive according to claim 1 , wherein said aqueous cerium-containing light rare-earth salt solution in the step (a) is obtained by a method comprising physicochemically separating and removing impurities other than rare-earth elements, and Nd and heavier rare-earth elements from an ore containing rare-earth elements.
4. The method for producing a cerium oxide-based abrasive according to claim 1 , wherein at least either one of the light rare-earth salt particles in the steps (a) and (b) is selected from the group consisting of a carbonate particle, a hydroxide particle, an oxalate particle and a mixture thereof.
5. The method for producing a cerium oxide-based abrasive according to claim 1 , wherein the fluorine content of said cerium oxide-based abrasive is from 0.1 to 10 mass %.
6. The method for producing a cerium oxide-based abrasive according to claim 1 , wherein the step (a) comprises removing impurities other than a light rare-earth salt by performing washing after the precipitation of a rare-earth salt particle.
7. The method for producing a cerium oxide-based abrasive according to claim 1 , wherein a wet grinding is not performed during the steps (a) to (d).
8. The method for producing a cerium oxide-based abrasive according to claim 1 , wherein the step (d) further comprises performing classification.
9. A method for polishing a glass substrate, comprising producing a cerium-oxide abrasive according to the method of claim 1 , and then polishing a glass substrate by using the cerium oxide-based abrasive.
10. A method for producing a glass substrate, comprising of polishing a glass substrate by the method of claim 9 .
11. A method for producing an optical lens, a hard disk, a display panel, a filter for cutting off a specific frequency, or a photomask for LSI or a display panel, wherein the method comprises polishing a glass substrate by the method of claim 9 .
12. The method for producing a cerium oxide-based abrasive according to claim 7 , wherein a grinding is not performed during the steps (a) to (d).
13. A method for polishing a glass substrate, comprising producing a cerium-oxide abrasive according to the method of claim 8 , and then polishing a glass substrate by using the cerium oxide-based abrasive.
14. A method for producing a glass substrate, comprising polishing a glass substrate according to the method of claim 13 .
15. A method for producing an optical lens, a hard disk, a display panel, a filter for cutting off a specific frequency, or a photomask for LSI or a display panel, wherein the method comprises polishing a glass substrate according to the method of claim 13 .