Semiconductor memory device
View Patent ↗Provided is a highly reliable multi-bit memory cell capable of miniaturization including: a semiconductor substrate with a channel formed therein; diffusion layers arranged at two sides of the channel, for serving as source/drain; an insulating film arranged on a part of the channel; a trap film made of an insulating material having an electron trapping characteristic, arranged on the semiconductor substrate, the diffusion layers and the insulating film, and including trap regions each capable of trapping electrons in at least areas in contact with the semiconductor substrate at two sides of the insulating film; and a gate electrode arranged on the trap film. The trap regions are also formed on side surfaces of the insulating film, and the trap film has a structure in which the trap film is bent upward from the surface of the semiconductor substrate in the trap regions due to the insulating film.
1. A semiconductor memory device, comprising:
a semiconductor substrate in which a channel region is formed;
a plurality of diffusion layers arranged at two sides of the channel region, as source/drain regions;
a trap film made of an insulating material having an electrons trapping characteristic, the trap film having first and second portions thereof, said first and second portions being other than parallel and being coupled at an edge portion, said edge portion being formed over said channel region; and
a gate electrode arranged over the trap film; and
wherein the gate electrode is arranged above areas where the diffusion layers are arranged, and above parts of the channel region where no insulating film is arranged, with the trap film interposed in between.
2. The semiconductor memory device as claimed in claim 1 , wherein an area between trap regions of the trap film at two sides of an insulating film arranged on a part of the channel region includes a structure in which the insulating film and the trap film are superposed on the semiconductor substrate in this sequence.
3. The semiconductor memory device as claimed in claim 1 , wherein an electrons trapping characteristic of an insulating film arranged on a part of the channel region is lower than that of the trap film.
4. The semiconductor memory device as claimed in claim 1 , wherein the trap film has a structure in which the trap film is bent upward from a surface of the semiconductor substrate in trap regions of the trap film due to an insulating film arranged on a part of the channel region.
5. The semiconductor memory device as claimed in claim 1 , wherein an insulating film arranged on a part of the channel is at least thicker in film thickness than the trap film.
6. The semiconductor memory device as claimed in claim 1 , wherein
the trap film comprises a laminated insulating film obtained by superposing a plurality of insulating films of different types, and
the trap film is thicker in film thickness than an insulating film having an electron trapping characteristic out of the plurality of insulating films in the trap film.
7. The semiconductor memory device as claimed in claim 1 ,
wherein said trap film comprises an insulating film formed over said source and said channel regions, said insulating film comprising said first portion and said second portion, a distance between said source region and said first portion being closer than a distance between said source region and said second portion and
a distance between said first portion and said channel region being different from a distance between said second portion and said channel region due to an overlapping of said first and second portions over said channel region, as caused by said first portion and said second portion being other than parallel.