IP Library › Patent Application 11894592
Patent Application
App. No. 11/894,592

Methods and apparatus for nanolapping

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Quick Facts
Patent No.
US None
App. No.
11/894,592
Abstract

A lapping system for lapping portions of a workpiece. The lapping system includes, a lap that is defined by a surface. Portions of the surface are a lapping surface. The lapping surface has a coating that enhances material removal from a workpiece in a lapping process. The lapping system further includes, a scanning probe microscope having a tip and a substrate. The scanning probe microscope controls lapping motion of the lap and workpiece.

Claims (4)

1 . A lapping system for lapping portions of a workpiece, the system comprising:

a lap being defined by a surface, wherein portions of the surface are a lapping surface; and wherein the lapping surface has a coating; wherein the coating enhances material removal from a workpiece in a lapping process; and

a scanning probe microscope having a tip and a substrate;

wherein the scanning probe microscope controls lapping motion of the lap and workpiece.