Electron beam apparatus and method for production of its specimen chamber
View Patent ↗A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.
1. A method for production of a specimen chamber of an electron beam apparatus comprising a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and the specimen chamber for housing the specimen, wherein
a non-magnetic material having conductivity is used as a material for a main body of the specimen chamber, and
engraving and milling is performed for forming the main body of the specimen chamber so that a thickness of the main body of the specimen chamber is thick enough to provide shielding properties against an AC magnetic field in an outer side of the specimen.
2. The method according to claim 1 , wherein said material is an aluminum alloy.
3. The method according to claim 1 , further comprising the step of magnetically plating at least one of an inner wall and outer wall of said main body of said specimen chamber.
4. The method according to claim 1 , wherein said engraving and milling step comprises integrally forming walls of said main body of said specimen chamber so as to substantially eliminate vacuum leakage to said main body of said specimen chamber.
5. A production method for a specimen chamber of an electron beam apparatus comprising a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and said specimen chamber for housing said specimen, wherein
a non-magnetic material having high conductivity is used as a material for a main body of said specimen chamber, and
said method further comprises integrally forming said main body of said specimen chamber by a technique other than welding so that a thickness of the main body of the specimen chamber is thick enough to provide shielding properties against an AC magnetic field in an outer side of the specimen chamber.
6. The method according to claim 5 , wherein said technique comprises engraving and milling.
7. The method according to claim 5 , wherein said material is an aluminum alloy.
8. The method according to claim 5 , further comprising the step of magnetically plating at least one of an inner wall and outer wall of said main body of said specimen chamber.
9. The method according to claim 5 , further comprising the step of integrally producing a sidewall and a bottom wall of said main body of said specimen chamber.