Single, Right-Angled End-Block
A single, right-angled end-block is claimed for rotatably carrying a target in a sputtering apparatus. The end-block comprises all necessary means to drive, energise, bear and seal (coolant and gas) the target in the sputtering apparatus from the outside through a single opening in a wall or door. The right-angled end-block rotates the target around an axis of rotation that is parallel to the wall on which the target is mounted. By preference the end-block is situated below the target in order to allow easy drainage of the coolant.
1 . An end-block for rotatably carrying a target around an axis of rotation in a sputtering apparatus,
said end-block having a mounting flange for mounting said end-block to said sputtering apparatus, said end-block further comprising a drive means, an electrical rotatable contact means, a bearing means, a coolant seal means and a vacuum seal means
wherein
said end-block is mountable with said axis of rotation being substantially parallel to said flange.
2 . The end-block of claim 1 further comprising an attachment means for attaching and detaching of said target.
3 . The end-block according to claim 1 , wherein said axis of rotation is substantially vertical.
4 . The end-block of claim 3 wherein said end-block is mounted below said target.
5 . The end-block according to claim 1 , wherein said axis of rotation is substantially horizontal.
6 . A sputtering apparatus comprising walls for enclosing an evacuable space, a rotatable target having an axis of rotation and an end-block for rotatably carrying said target at one end of said target, said end-block comprising a drive means, an electrical rotatable contact means, a bearing means, a coolant seal means and a vacuum seal means,
wherein
said end-block is mountable to one of said walls with said axis of rotation being substantially parallel to said one wall
7 . The sputtering apparatus of claim 6 wherein said end-block further comprises an attachment means for attaching and detaching of said target.
8 . The sputtering apparatus according to claim 6 , wherein said target is further held centred by a centring block, said centring block being mounted at the end of said target, opposite to the end that is carried by said end-block.
9 . The sputtering apparatus according to claim 6 , wherein said target is substantially vertically mountable.
10 . The sputtering apparatus as in claim 9 wherein said end-block is mounted below said target.
11 . The sputtering apparatus according to claim 6 , wherein said target is substantially horizontally mountable.
12 . The end-block according to claim 2 , wherein said axis of rotation is substantially vertical.
13 . The end-block according to claim 2 , wherein said axis of rotation is substantially horizontal.
14 . The sputtering apparatus according to claim 7 , wherein said target is further held centred by a centring block, said centring block being mounted at the end of said target, opposite to the end that is carried by said end-block.
15 . The sputtering apparatus according to claim 7 , wherein said target is substantially vertically mountable.
16 . The sputtering apparatus according to claim 8 , wherein said target is substantially vertically mountable.
17 . The sputtering apparatus according to claim 7 , wherein said target is substantially horizontally mountable.
18 . The sputtering apparatus according to claim 8 , wherein said target is substantially horizontally mountable.