Compound, polymer, and radiation-sensitive composition
A radiation-sensitive resin composition is provided which has high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, and pattern shape, and, in particular, a high resolution radiation-sensitive resin composition providing a wide DOF and excelling in LER. Also provided are a polymer which can be used in the composition and a novel compound useful for synthesizing the polymer. The novel compound is shown by the following formula (2), wherein R 4 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the R f s represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, M m+ represents a metal ion or an onium cation, m represents an integer of 1 to 3, and p is an integer of 1 to 8.
1. A compound shown by the following formula (1),
wherein R 1 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, R 2 and R 3 independently represent a hydrogen atom or a substituted or unsubstituted, linear or branched alkyl group having 1 to 10 carbon atoms, M m+ represents an onium cation, m represents an integer of 1 to 3, and n represents an integer of 0 to 3.
2. A compound shown by the following formula (2),
wherein R 4 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the R f groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, M m+ represents an onium cation, m represents an integer of 1 to 3, and p represents an integer of 1 to 8.
3. The compound according to claim 2 , wherein A represents a —(CO)O-A′- group, and wherein A′ represents a divalent hydrocarbon group, a divalent hydrocarbon group which contains at least one hetero atom, or a single bond.
4. A compound shown by the following formula (3),
wherein R 5 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, R 6 represents an —OR 6′ group or an —R 6′ group, wherein R 6 is represented by the following formulae (3a) or (3b), at least one of the R f groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, and q represents an integer of 1 to 8
wherein, in formula (3a), Y represents a divalent organic group and, in formula (3b), R 14 and R 15 independently represent a hydrogen atom or a monovalent organic group, or form a ring together with the carbon atom to which R 14 and R 15 bond.
5. A polymer prepared by polymerizing or copolymerizing at least one compound according to formulae (1), (2) or (3) below, wherein the polymer has a weight average molecular weight determined by gel permeation chromatography of 1,000 to 100,000,
wherein:
in formula (1), R 1 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, R 2 and R 3 independently represent a hydrogen atom or a substituted or unsubstituted, linear or branched alkyl group having 1 to 10 carbon atoms, M m+ represents an onium cation, m represents an integer of 1 to 3, and n represents an integer of 0 to 3;
in formula (2), R 4 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the R f groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, M m+ represents an onium cation, m represents an integer of 1 to 3, and p represents an integer of 1 to 8;
in formula (3), R 5 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, R 6 represents an —OR 6′ group or an —R 6′ group, wherein R 6 is represented by the following formulas (3a) or (3b), at least one of the R f groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, and q represents an integer of 1 to 8
wherein, in formula (3a), Y represents a divalent organic group and, in formula (3b), R 14 and R 15 independently represent a hydrogen atom or a monovalent organic group, or form a ring together with the carbon atom to which R 14 and R 15 bond.
6. The polymer of claim 5 , wherein the polymer is prepared by copolymerizing a compound represented by the following formula (4) with the at least one compound according to formulae (1), (2) or (3),
wherein, in formula (4), R 7 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, each R 8 independently represents a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, a derivative thereof, or a linear or branched alkyl group having 1 to 4 carbon atoms, and (i) at least one of the R 8 groups is the alicyclic hydrocarbon group or the derivative thereof, or (ii) two of the R 8 groups form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms or a derivative thereof in combination with the carbon atom to which the two R 8 groups bond.
7. The polymer according to claim 6 , wherein the polymer is prepared by copolymerizing a monomer containing a lactone skeleton on side chains with the at least one compound according to formulae (1), (2) or (3) and the compound represented by formula (4).
8. A radiation-sensitive resin composition comprising an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali but becomes readily-soluble in alkali by the action of an acid, wherein the acid-dissociable group-containing resin is a polymer according to claim 5 .
9. A method for producing the compound according to claim 3 , comprising synthesizing the compound by a step shown by the following reaction formula,
wherein X 1 represents a halogen atom, at least one of the R f groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, R 4 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, A′ represents a substituted or unsubstituted, linear or branched alkylene group having 1 to 20 carbon atoms, an alkylene group having at least one hetero atom, or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, M m+ represents an onium cation, m represents an integer of 1 to 3, and p represents an integer of 1 to 8.
10. A polymer prepared by copolymerization of at least one compound represented by the following formulae (1), (2), or (3) and a compound represented by the following formula (4), wherein the polymer has a weight average molecular weight determined by gel permeation chromatography of 1,000 to 100,000
wherein:
in formula (1), R 1 is a methyl group, a trifluoromethyl group, or a hydrogen atom, R 2 and R 3 independently represent a hydrogen atom or a substituted or unsubstituted, linear or branched alkyl group having 1 to 10 carbon atoms, M m+ represents a metal ion or an onium cation, m represents an integer of 1 to 3, and n is an integer of 0 to 3;
in formula (2), R 4 is a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the R f groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, M m+ represents a metal ion or an onium cation, m represents an integer of 1 to 3, and p represents an integer of 1 to 8;
in formula (3), R 5 is a methyl group, a trifluoromethyl group, or a hydrogen atom, R 6 indicates a monovalent organic group, at least one of the R f groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, and q is an integer of 1 to 8; and
in formula (4), R 7 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, R 8 independently represents a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, a derivative thereof, or a linear or branched alkyl group having 1 to 4 carbon atoms, and (i) at least one of the R 8 groups is the alicyclic hydrocarbon group or the derivative thereof, or (ii) two of the R 8 groups form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms or a derivative thereof in combination with the carbon atom to which the two R 8 groups bond.
11. The polymer according to claim 10 , wherein A in formula (2) represents a —(CO)O-A′- group, wherein A′ represents a divalent hydrocarbon group, a divalent hydrocarbon group which contains at least one hetero atom, or a single bond.
12. The polymer according to claim 10 , wherein the polymer is prepared by copolymerizing a monomer containing a lactone skeleton on side chains with the at least one compound according to formulae (1), (2) or (3) and the compound represented by formula (4).
13. A radiation-sensitive resin composition comprising an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali but becomes readily-soluble in alkali by the action of an acid, wherein the acid-dissociable group-containing resin is a polymer according to claim 10 .
14. A radiation-sensitive resin composition comprising an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali but becomes readily-soluble in alkali by the action of an acid, wherein the acid-dissociable group-containing resin is a polymer according to claim 11 .
15. A radiation-sensitive resin composition comprising an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali but becomes readily-soluble in alkali by the action of an acid, wherein the acid-dissociable group-containing resin is a polymer according to claim 12 .
16. A radiation-sensitive resin composition comprising an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali but becomes readily-soluble in alkali by the action of an acid, wherein the acid-dissociable group-containing resin is a polymer according to claim 6 .
17. A radiation-sensitive resin composition comprising an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali but becomes readily-soluble in alkali by the action of an acid, wherein the acid-dissociable group-containing resin is a polymer according to claim 7 .
18. The polymer of claim 5 , wherein A in formula (2) is a —(CO)O-A′- group, wherein A′ represents a divalent hydrocarbon group, a divalent hydrocarbon group which contains at least one hetero atom, or a single bond.
19. A radiation-sensitive resin composition comprising an acid-dissociable group-containing resin which is insoluble or scarcely soluble in alkali but becomes readily-soluble in alkali by the action of an acid, wherein the acid-dissociable group-containing resin is a polymer according to claim 18 .