ASSEMBLY FOR ADJUSTING AN OPTICAL ELEMENT

1 . An assembly for positioning of an optical element with respect to a mount, wherein

said optical element is positionable by a positioning arrangement, wherein

said positioning arrangement comprises at least a single elastic means that one of shifts and moves said optical element in two degrees of freedom independently by exerting one of a force and a torque on one of the optical element itself, a flange of said optical element, a holder enclosing said optical element and a support enclosing said optical element.

2 . The assembly of claim 1 , wherein

one of said holder and said support comprises at least a single isostatic mount to which one of a force and a torque is applied by said elastic means wherein

said isostatic mount is adjustable in at least two degrees of freedom.

3 . The assembly of claim 2 , wherein

said at least one isostatic mount is one of a bipod and a bipod structure.

4 . The assembly of any of claim 1 , wherein

said elastic means comprises one of a reduction means, a spring, an elastic lever an elastic rod, an elastic tape, an elastic belt, an elastic gear-wheel and an elastic wheel.

5 . The assembly of claim 1 , wherein

said elastic means is one of moveable and shiftable in each of said two degrees of freedom one of by two separate means, by two piezoelectric actuators, by two electostrictive actuators, by two motors, by two pneumatic means and by two hydraulic means.

6 . The assembly of claim 1 , wherein

three elastic means are provided that each are one of shiftable and moveable in two degrees of freedom.

7 - 13 . (canceled)

14 . An assembly for one fixation an adjusting of an optical element with regard to one of an outer mount and a support, wherein

said optical element is alignable with regard to one of a structure of an optical arrangement, an objective structure, an objective barrel having an optical axis and neighbouring mounts by means of an adjusting arrangement,

said adjusting arrangement comprises at least one of an elastic means a spring, an elastic rod, an elastic stick, an elastic tape, an elastic gear wheel and an elastic gear box by which one of a force and a torque is applicable to said optical element.

said optical element is positioned in an inner mount and one of said force and said torque for adjusting of said optical element is applied to said inner mount.

15 . (canceled)

16 . The assembly according to claim 14 wherein

said inner mount is connected to said outer mount by means of at least one intermediate part.

17 . The assembly according to claim 16 , wherein

said at least one intermediate part comprises a first bearing element connected to said inner mount, an intermediate element and at least one adjusting means by which one of a force and a torque is applicable for one of adjusting and positioning of said optical element by means of an elastic attacking means.

18 . The assembly according to claim 17 , wherein

said elastic attacking means comprises one of an elastic rod serving as a lever arm of a force in a lever, an elastic tape for transmission of a torque by means of at least one roll, an elastic gear wheel in a reduction gear for transmission of a torque, any elastic means transmitting a force onto said intermediate element, a spring transmitting a force onto said element, a spiral spring transmitting a force onto said intermediate element, and an elastic tape for transmitting a force onto said intermediate element.

19 . The assembly of claim 18 , wherein

said intermediate element is rigid or stiff and at least less elastic than said attacking means.

20 . The assembly of claim 14 , wherein

at least a second bearing element is provided, said second bearing element being connected to said outer mount.

21 . The assembly of claim 17 , wherein

said at least one adjusting means comprises at least one elastic lever attached to said intermediate element by one of its distal ends.

22 . (canceled)

23 . (canceled)

24 . The assembly of claim 21 , wherein

said at least one lever is connected at its second distal end with at least one of a fixation element, an element comprising at least one holes defining a predetermined position, an actuator and an adjustor.

25 . The assembly according to claim 24 , wherein

said actuator comprises one of an electromagnetic actuating means, an electrostrictive actuating means, a magnetostrictive actuating means, a pneumatic actuating means, a hydraulic actuating means and a mechanic actuating means.

26 - 36 . (canceled)

37 . An assembly for one of fixation, adjusting and or positioning of an optical element with regard to an outer mount, wherein

said optical element is one of alignable and positionable with regard to one of a structure of an optical assembly, a barrel of an objective having an optical axis neighbouring mounts and neighboring supports

the positioning or adjusting means is embodied by an intermediate ring positioned between said optical element and said outer mount.

38 . The assembly according to claim 37 , wherein

said optical element is received in an inner mount and

said intermediate ring is borne between said inner mount and said outer mount.

39 . The assembly according to claim 37 , wherein

adjusting means or actuators are arranged at said intermediate ring.

40 . The assembly according to claim 37 , wherein

at least one of a bearing elements of said assembly, a ring segment of said assembly and said intermediate ring is generated by eroding.

41 . The assembly according to claim 40 , wherein

one of said positioning means and said adjusting means comprises at least a single elastic element that is installed under tension in one of said intermediate ring and said ring segment and

one of said positioning means and said adjusting means applies one of two forces and torques being in equilibrium.

42 . The assembly according to claim 41 wherein

one of said positioning means and said adjusting means comprises at least an elastic element that applies one of a force and a torque to said intermediate ring by application of a torsion to said elastic element.

43 . The assembly according to claim 42 , wherein

one of said torque and said force is applied to said intermediate ring by means of one of at least one reduction element, and a projection in the form of a block.

44 . An assembly for one of fixation and adjusting of an optical element with regard to one of an outer support and a mount, wherein

said optical element is alignable with regard to one of a structure of an optical assembly, a structure of an objective, having an optical axis and a neighbouring mount by means of at least one adjusting arrangement

the at least one adjusting arrangement comprises an elastic element to which one of a force and a torque is applied.

45 . The assembly according to claim 44 , wherein

said optical element is positioned in one of an inner mount and an inner ring.

46 . (canceled)

47 . An adjusting assembly comprising an arrangement for one of moving and shifting one of an optical element and a support one of enclosing and supporting an optical element, wherein

said arrangement comprises one of at least a single mechanic transmission and a single mechanic reduction arrangement having a work arm supporting an optical element of a microlithographic exposure apparatus and a lever arm

at least one of said arms is at least one of made of an elastic material and is linked to an elastic means for transmitting a force.

48 . (canceled)