Separation type unit pixel of 3-dimensional image sensor and manufacturing method thereof
A separation type unit pixel of an image sensor, which can control light that incidents onto a photodiode at various angles, and be suitable for a zoom function in a compact camera module by securing an incident angle margin, and a manufacturing method thereof are provided. The unit pixel of an image sensor includes: a first wafer including a photodiode containing impurities having an impurity type opposite to that of a semiconductor material and a pad for transmitting photoelectric charge of the photodiode to outside; a second wafer including a pixel array region in which transistors except the photodiode are arranged regularly, a peripheral circuit region having an image sensor structure except the pixel array, and a pad for connecting pixels with one another; and a connecting means connecting the pad of the first wafer and the pad of the second wafer. Accordingly, manufacturing processes can be simplified by constructing the upper wafer using only a photodiode and the lower wafer using the pixel array region except the photodiode, and costs are reduced since transistors are not included in the upper wafer portion, which in turn cannot affect the interaction with light.
1. A separation type unit pixel having a 3D structure for an image sensor comprising:
a first wafer including a photodiode containing impurities having an impurity type opposite to that of a semiconductor substrate and a pad for transmitting photoelectric charge of the photodiode to outside;
a second wafer including a pixel array region in which transistors except the photodiode are arranged regularly, a peripheral circuit region having an image sensor structure except the pixel array, and a pad for connecting pixels with one another; and
a connecting pad connecting the pad of the first wafer and the pad of the second wafer,
wherein the first wafer comprises:
a semiconductor substrate which contains specific impurities for forming a photodiode;
a first transparent buffer layer which is inserted between a color filter and the semiconductor substrate to facilitate formation of structures and to improve light transmittance;
a photodiode which contains impurities having an impurity type opposite to that of the semiconductor substrate; and
a pad transmitting photoelectric charge of the photodiode to outside.
2. The separation type unit pixel having a 3D structure for an image sensor of claim 1 , wherein the first wafer comprises:
a color filter which allows each pixel to display a specific color;
a microlens which collects light to be condensed onto the photodiode; and
a second transparent buffer layer which is inserted between the microlens and the color filer to facilitate the formation of structures and to improve light transmittance.
3. The separation type unit pixel having a 3D structure for an image sensor of claim 1 , wherein, in the pixel array region of the second wafer, the rest of the circuit elements constituting a pixel such as a transmission transistor, a reset transistor, a source follower transistor, and/or a blocking switch transistor are arranged regularly.
4. The separation type unit pixel having a 3D structure for an image sensor of claim 1 , wherein the peripheral circuit region comprises a circuit for extracting an image sensor signal, a CDS circuit, a circuit for processing a common analog signal, a digital control circuit, and an image signal processing digital circuit.