Method for forming MIM in semiconductor device
View Patent ↗The present invention relates to a semiconductor device, and more particularly to a method for forming a metal/insulator/metal (MIM). The method comprises the steps of: forming a metal wiring surrounded by the inter-metal dielectric film; forming a plurality of insulating film on the metal wiring in sequence; and forming a metal barrier film on the insulating film, whereby the insulating film functioning as a buffer film can mitigate the stress between the films.
1. An apparatus comprising:
an inter-metal dielectric film;
a plurality of metal wirings formed in the dielectric film;
a first insulating film formed over the metal wirings, wherein the first insulating film comprising at least one of an oxide-based material and undoped silicate glass;
a second insulating film formed over the first insulating film, wherein the second insulating film comprising SiN; and
a metal barrier film formed over the second insulating film.
2. The apparatus of claim 1 , wherein the inter-metal dielectric film comprises a black-diamond material and the metal barrier film comprises any one of a tantalum (Ta) and titanium (Ti) based material.
3. The apparatus of claim 2 , wherein the inter-metal dielectric film has a thickness of between approximately 1.8 to 2.2 um, the first insulating film has a thickness of between approximately 550 to 650 Å, the second insulating film has a thickness of between approximately 650 to 750 Å, and the barrier metal film has a thickness of between approximately 950 to 1050 Å.
4. The apparatus of claim 1 , wherein the first insulating film comprises undoped silicate glass having and a thickness of between approximately 550 to 650 Å and a compressive stress of approximately −4.49E8 dyn/cm2.
5. The apparatus of claim 1 , wherein the first insulating film comprises an oxide-based material having and a thickness of between approximately 550 to 650 Å and a compressive stress of between approximately −2.49E8 to −6.49E8 dyn/cm2.
6. The apparatus of claim 1 , wherein the second insulating film comprises SiN having a compressive stress of approximately −1.32E9 dyn/cm2.
7. The apparatus of claim 6 , wherein the barrier metal film has a compression stress larger than the compressive stress of the second insulating film.