Articles comprising manganese doped barium titanate thin film compositions
View Patent ↗The present invention is directed to an article comprising a dielectric layer formed from any solution composition that can form barium titanate during firing and containing manganese in an amount between 0.002 and 0.05 atom percent of the solution composition, wherein the dielectric layer has been formed on metal foil and fired in a reducing atmosphere.
1. An article comprising
a dielectric layer
formed from any solution composition that can form barium titanate during firing and
containing manganese in an amount between 0.002 and 0.05 atom percent of the solution composition,
wherein the dielectric layer has been formed on metal foil and fired at a temperature between about 800° C. and 1050° C. in a reducing atmosphere, and wherein the dielectric layer has a thickness between 0.4 and 1.0 micrometer and a grain size between 0.1 and 0.2 micrometers.
2. The article of claim 1 , wherein the barium has been partially or substanially replaced by lead, strontium, calcium; or mixtures thereof.
3. The article of claim 1 , wherein the titanium has been partially or substantially replaced by zirconium, hafnium, tin; or mixtures thereof.
4. A capacitor comprising the article of claim 1 having a capacitance density of greater than 1 uF/cm 2 .
5. A capacitor comprising the article of claim 1 , wherein the dielectric layer has a breakdown voltage greater than 20 volts.
6. A capacitor comprising the dielectric layer of claim 1 , having a dissipation factor of less than about 8%.
7. A capacitor comprising the dielectric layer of claim 1 , having a leakage current density of less than approximately 1 milli-amp/cm 2 at 10 volts.
8. An inner layer panel comprising the article of claim 1 .
9. A printed wiring board comprising the article of claim 1 .
10. The article of claim 1 further comprising a top electrode formed over the dielectric layer.
11. The article of claim 10 wherein the top electrode is formed by sputtering or combustion vapor deposition.
12. The article of claim 10 wherein the top electrode is comprised of copper.
13. The article of claim 1 wherein the metal foil is comprised of a base metal.
14. The article of claim 13 wherein the base metal foil is comprised of copper.