Sample operation apparatus
View Patent ↗There is provided a sample operation apparatus in which, by a static electricity force acting between a probe and a sample, an accurate position is gripped without the sample being moved, and the sample can be operated by the probe for an observation, a grip, a release, or the like. In a casing body capable of being sealed, there are installed a sample operation tweezers comprising an observation probe and a grip probe, and a sample base fixing a substrate on which the sample is mounted. By the facts that a surface of the substrate is treated such that its hydrophilic nature is higher than the sample operation tweezers, and that a humidity in the casing body is controlled by a humidity control device, there is made such that an actuation of a grip, a movement, a separation or the like of the sample is performed under a state in which water films are formed on the sample, the substrate and a surface of the sample operation tweezers.
1. A sample operation apparatus having:
a casing body capable of being sealed,
a sample operation tweezers comprising an observation probe having a tip , and a grip probe provided while adjoining the observation probe with a predetermined distance,
a sample base fixing a substrate on which a sample is mounted,
the sample operation tweezers and the sample base being possessed in the casing body,
a humidity control device controlling a humidity in the casing body,
a displacement detection means detecting a displacement of the observation probe, and
a three-dimensional movement means moving the observation probe or the grip probe in three-dimensional directions relative to a surface of the sample base,
wherein the sample operation tweezers is made such that its hydrophilic nature becomes lower than the substrate.
2. A sample operation apparatus according to claim 1 , wherein the sample operation tweezers has an electrical conductivity and is grounded.
3. A sample operation apparatus according to claim 1 , wherein the sample base is grounded.
4. A sample operation apparatus according to claim 1 , wherein the sample operation tweezers has a surface treated so as to become water-repellent.
5. A sample operation apparatus according to claim 1 , wherein the grip probe has a heating part.
6. A sample operation apparatus according to claim 1 , wherein the sample base possesses a sample base temperature control mechanism controlling a temperature of the sample base.