Method of fabricating semiconductor device
View Patent ↗A method of fabricating a semiconductor device is provided. A gate structure is formed on a substrate and then a first spacer is formed at a sidewall of the gate structure. Next, recesses are respectively formed in the substrate at two sides of the first spacer. Thereafter, a buffer layer and a doped semiconductor compound layer are formed in each recess. An extra implantation region is respectively formed on the surfaces of each buffer layer and each doped semiconductor compound layer. Afterward, source/drain contact regions are formed in the substrate at two sides of the gate structure.
1. A method of fabricating a semiconductor device, comprising:
forming a gate structure on a substrate;
forming a source/drain extension region respectively in the substrate at two sides of the gate structure followed by forming a first spacer at a sidewall of the gate structure and forming a recess respectively in the substrate at two sides of the first spacer;
forming a buffer layer and a doped semiconductor compound layer in each recess;
forming an extra implantation region respectively on the exposed surfaces of the buffers layer and the doped semiconductor compound layers, wherein a depth in the substrate of the extra implantation region is less than a depth in the substrate of the corresponding doped semiconductor compound layer; and
forming a source/drain contact region respectively in the substrate at two sides of the gate structure, wherein the extra implantation regions and the source/drain contact regions have dopants of the same conductivity type.
2. The method of fabricating a semiconductor device as claimed in claim 1 , wherein the source/drain contact regions are formed after the extra implantation regions are formed, and a forming method of the source/drain contact regions comprises:
forming a second spacer at the sidewall of the gate structure; and
performing an ion implantation process, so as to form the source/drain contact regions in the substrate not covered by the second spacer.
3. The method of fabricating a semiconductor device as claimed in claim 2 , further comprising removing the first spacer before forming the second spacer.
4. The method of fabricating a semiconductor device as claimed in claim 1 , further comprising forming an offset spacer at the sidewall of the gate structure before forming the source/drain extension regions.
5. The method of fabricating a semiconductor device as claimed in claim 1 , wherein the source/drain contact regions are formed after the gate structure is formed and before the first spacer is formed, and the method comprises:
forming a second spacer at the sidewall of the gate structure;
performing an ion implantation process, so as to form the source/drain contact regions in the substrate; and
removing the second spacer.
6. The method of fabricating a semiconductor device as claimed in claim 5 , further comprising forming a source/drain extension region respectively in the substrate at two sides of the gate structure before forming the second spacer.
7. The method of fabricating a semiconductor device as claimed in claim 6 , further comprising forming an offset spacer at the sidewall of the gate structure before forming the source/drain extension regions.
8. The method of fabricating a semiconductor device as claimed in claim 1 , wherein a forming method of the extra implantation regions comprises performing an ion implantation process.
9. The method of fabricating a semiconductor device as claimed in claim 8 , wherein an energy of the ion implantation process is not greater than that of the source/drain contact regions and not less than that of the source/drain extension regions.
10. The method of fabricating a semiconductor device as claimed in claim 1 , wherein a concentration of dopant implanted in the extra implantation regions is not greater than that of the source/drain contact regions.
11. The method of fabricating a semiconductor device as claimed in claim 1 , wherein a concentration of dopant implanted in the extra implantation regions is not less than that of the two source/drain extension regions formed in the substrate.
12. The method of fabricating a semiconductor device as claimed in claim 1 , wherein the semiconductor device comprises a PMOS device.
13. The method of fabricating a semiconductor device as claimed in claim 12 , wherein the doped semiconductor compound comprises P-type doped SiGe.
14. The method of fabricating a semiconductor device as claimed in claim 12 , wherein the buffer layer comprises an undoped SiGe or a P-type doped SiGe with a dopant concentration lower than that of the doped semiconductor compound.
15. The method of fabricating a semiconductor device as claimed in claim 1 , wherein the semiconductor device comprises an NMOS device.
16. The method of fabricating a semiconductor device as claimed in claim 15 , wherein the doped semiconductor compound comprises N-type doped SiC.
17. The method of fabricating a semiconductor device as claimed in claim 15 , wherein the buffer layer comprises an undoped SiC or an N-type doped SiC with a dopant concentration lower than that of the doped semiconductor compound.
18. The method of fabricating a semiconductor device as claimed in claim 1 , further comprising forming a contact etch stop layer (CESL) above the substrate.