Workpiece with semiconductor chips and molding, semiconductor device and method for producing a workpiece with semiconductors chips
View Patent ↗A workpiece has at least two semiconductor chips, each semiconductor chip having a first main surface, which is at least partially exposed, and a second main surface. The workpiece also includes an electrically conducting layer, arranged on the at least two semiconductor chips, the electrically conducting layer being arranged at least on regions of the second main surface, and a molding compound, arranged on the electrically conducting layer. In the molding compound a contact via is arranged.
1. A workpiece, comprising
at least two semiconductor chips, each semiconductor chip having a first main surface which is at least partially exposed, and a second main surface;
an electrically conducting layer arranged on the at least two semiconductor chips, the electrically conducting layer being arranged at least on regions of the second main surface and also being arranged on regions of side faces of the semiconductor chips;
a molding compound arranged on the electrically conducting layer; and
at least one contact via through the molding compound.
2. The workpiece as claimed in claim 1 , at least one contact area which is electrically connected to the contact via being arranged on a second main surface of the workpiece.
3. The workpiece as claimed in claim 1 , the first main surfaces of the semiconductor chips having active semiconductor chips structures.
4. The workpiece as claimed in claim 1 , the second main surfaces of the semiconductor chips being embedded in the molding compound.
5. The workpiece as claimed in claim 1 , the electrically conducting layer being formed from a conductive polymer.
6. The workpiece as claimed in claim 1 , the electrically conducting layer being formed from a metal.
7. The workpiece as claimed in claim 1 , the electrically conducting layer being formed from a plastic with electrically conducting particles.
8. The workpiece as claimed in claim 1 , a thermoplastic material being provided as the molding compound.
9. The workpiece as claimed in claim 1 , a thermosetting material being provided as the molding compound.
10. The workpiece as claimed in claim 1 , it being formed as a panel with semiconductor chips arranged in rows and columns at semiconductor device positions.
11. The workpiece as claimed in claim 1 , the second main surfaces of the semiconductor chips being formed as passive semiconductor chip back sides.
12. The workpiece as claimed in claim 11 , the side faces of the semiconductor chips being embedded in the molding compound.
13. The workpiece as claimed in claim 1 , the first main surface of the workpiece having a wiring layer.
14. The workpiece as claimed in claim 13 , the contact via being electrically connected to the wiring layer.
15. The workpiece as claimed in claim 1 , the electrically conducting layer connecting the at least two semiconductor chips to one another in an electrically conducting manner.
16. The workpiece as claimed in claim 15 , regions of the electrically conducting layer on a first main surface of the workpiece being exposed.
17. The workpiece as claimed in claim 15 , the electrically conducting layer being formed as a grid structure.
18. The workpiece as claimed in claim 15 , the electrically conducting layer being formed as a closed layer which substantially completely covers the interfaces of the semiconductor chips with the molding compound and a first main surface of the workpiece outside semiconductor chip regions.
19. The workpiece as claimed in claim 1 , an insulating layer of an electrically insulating material being arranged between each semiconductor chip and electrically conducting layer.
20. The workpiece as claimed in claim 19 , the electrically conducting layer forming an electromagnetic shielding for the semiconductor chips.
21. The workpiece as claimed in claim 19 , parylene being provided as the insulating material.
22. The workpiece as claimed in claim 19 , polyimide being provided as the insulating material.
23. A semiconductor device, comprising:
at least one semiconductor chip with a first main surface, a second main surface and side faces;
an electrically conducting layer arranged on the semiconductor chip, the electrically conducting layer being arranged at least on regions of the second main surface and on regions of the side faces;
a molding compound arranged on the electrically conducting layer; and
at least one contact via through the molding compound.
24. The semiconductor device as claimed in claim 23 , regions of the electrically conducting layer forming a coplanar surface with the first main surface of the semiconductor chip.
25. The semiconductor device as claimed in claim 23 , the electrically conducting layer being formed as a grid structure.
26. The semiconductor device as claimed in claim 23 , the electrically conducting layer being formed as a closed layer which completely covers the interfaces of the semiconductor chip with the plastic package molding compound and the first main surface of the semiconductor device outside the region of the semiconductor chip.
27. A semiconductor device, comprising:
at least one semiconductor chip with a first main surface and a second main surface;
an insulating layer of an electrically insulating material arranged on the semiconductor chip, the insulating layer being arranged at least on regions of the second main surface;
an electrically conducting layer arranged on the insulating layer and forming an electromagnetic shielding for the semiconductor chip;
a molding compound arranged on the electrically conducting layer; and
at least one contact via through the molding compound.
28. The semiconductor device as claimed in claim 27 , parylene being provided as the insulating material.
29. The semiconductor device as claimed in claim 27 , polyimide being provided as the insulating material.
30. The semiconductor device as claimed in claim 27 , the first main surface of the semiconductor chip having an active semiconductor chip structure.
31. The semiconductor device as claimed in claim 27 , at least one contact area which is electrically connected to the contact via being arranged on the second main surface of the semiconductor device.
32. The semiconductor device as claimed in claim 27 , the second main surface of the semiconductor chip being formed as a passive back side of the semiconductor chip.
33. The semiconductor device as claimed in claim 27 , the side faces of the semiconductor chip being embedded in the molding compound.
34. The semiconductor device as claimed in claim 27 , the second main surface of the semiconductor chip being embedded in the molding compound.
35. The semiconductor device as claimed in claim 27 , the electrically conducting layer being formed from a conductive polymer.
36. The semiconductor device as claimed in claim 27 , the electrically conducting layer being formed from a metal.
37. The semiconductor device as claimed in claim 27 , the electrically conducting layer being formed from a plastic with electrically conducting particles.
38. The semiconductor device as claimed in claim 27 , a thermoplastic material being provided as the molding compound.
39. The semiconductor device as claimed in claim 27 , a thermosetting material being provided as the molding compound.
40. The semiconductor device as claimed in claim 27 , a first main surface of the semiconductor device having a wiring layer.
41. The semiconductor device as claimed in claim 40 , the contact via being electrically connected to the wiring layer.