MAGNETORESISTIVE ELEMENT
The invention provides a magnetoresistive element including a seed layer having a flat surface, which makes it possible to improve the flatness of all of the elements. A seed layer is formed in a two-layer structure of a first seed layer that is formed on a lower shield layer and a second seed layer that is formed underneath an anti-ferromagnetic layer, and the second seed layer is formed of ruthenium (Ru). According to this structure, the flatness of the surface of the seed layer is improved, which makes it possible to improve the flatness of interfaces between layers of an element formed on the seed layer. As a result, it is possible to manufacture a magnetoresistive element having a high dielectric breakdown voltage and high operational reliability.
1 . A magnetoresistive element comprising:
a lower shield layer; and
a seed layer, an anti-ferromagnetic layer, a first magnetic layer, a non-magnetic material layer, and a second magnetic layer that are sequentially formed on the lower shield layer in this order from the bottom,
wherein the magnetization of the second magnetic layer varies due to an external magnetic field,
the seed layer has a two-layer structure of a first seed layer, which is a lower layer, and a second seed layer,
the first seed layer comprises at least chromium (Cr), and the second seed layer comprises ruthenium (Ru).
2 . The magnetoresistive element according to claim 1 ,
wherein the first seed layer comprises nickel-iron-chromium (NiFeCr).
3 . The magnetoresistive element according to claim 1 ,
wherein the first seed layer comprises nickel-chromium (NiCr), or chromium (Cr).
4 . The magnetoresistive element according to claim 1 ,
wherein the thickness of the second seed layer is smaller than that of the first seed layer.
5 . The magnetoresistive element according to claim 1 ,
wherein the first magnetic layer is a pinned magnetic layer whose magnetization direction is fixed,
the second magnetic layer is a free magnetic layer whose magnetization varies due to the external magnetic field, and
the non-magnetic material layer comprises an insulating material.