Semiconductor manufacturing apparatus and semiconductor manufacturing method
View Patent ↗A semiconductor manufacturing apparatus includes a supporting unit for supporting a semiconductor wafer received from a CMP apparatus and a vacuuming system for holding the wafer on the supporting unit. The vacuuming is applied only in a peripheral area of the wafer. In the peripheral area of the wafer, any circuit such as interconnections and devices are not manufactured. When the wafer is released by supplying gas to the vacuumed space, even if static electricity occurs, the electronic circuit to be manufactured on the wafer does not harmed, because the static electricity occurs only in the peripheral area where any circuit does not exist.
1. A semiconductor manufacturing apparatus, comprising:
a supporting unit configured to support a semiconductor wafer received from a chemical mechanical polishing apparatus;
a vacuuming system vacuuming to hold the semiconductor wafer on the supporting unit;
a gas supply system configured to supply a gas to an area where the vacuuming system draw a vacuum to release the semiconductor wafer held by a vacuum contact from the supporting unit,
wherein the vacuuming is applied only in a peripheral area outer than a predetermined radius from a center of the semiconductor wafer.
2. The semiconductor manufacturing apparatus according to claim 1 , wherein electronic circuits are manufactured on the semiconductor wafer only in an area inner than the predetermined radius.
3. The semiconductor manufacturing apparatus according to claim 1 , wherein the supporting unit supports a surface of the semiconductor wafer on which an electronic circuit is to be manufactured from vertically below.
4. The semiconductor manufacturing apparatus according to claim 1 , wherein the predetermined radius is 3 mm smaller than a radius of the semiconductor wafer.
5. The semiconductor manufacturing apparatus according to claim 1 , wherein the supporting unit contacts the semiconductor wafer only in the peripheral area.
6. The semiconductor manufacturing apparatus according to claim 1 , wherein the gas includes carbon dioxide.
7. A semiconductor manufacturing method, comprising:
supporting a semiconductor wafer received from a chemical mechanical polishing apparatus by putting on a supporting member;
holding the semiconductor wafer on the supporting member by a vacuum contact; and
supplying a gas from a gas supply system to release the semiconductor wafer held by the vacuum contact from the supporting unit,
wherein the vacuum contact is only in a peripheral area outer than a predetermined radius from a center of the semiconductor wafer.
8. The semiconductor manufacturing method according to claim 1 , wherein said supporting unit is configured to support said semiconductor wafer along a central inner portion and the peripheral area.