Method of making a multi-layered semiconductor device
View Patent ↗In the multiple-layered semiconductor device and the method for manufacturing thereof according to the present invention, the resin is formed on the substrate around the semiconductor device, on which the semiconductor device is installed in the first semiconductor package. Therefore, a generation of a warpage of substrate is inhibited in the first semiconductor package. And since the first semiconductor package is stacked to and coupled to the second semiconductor package via the electric conductors that extend from the back surface of the second semiconductor package to the coupling lands on the substrate penetrating through the resin, a defective situation such as a coupling defective in the bump junction can be avoided when the junction of the second semiconductor package via the electric conductor is formed. Therefore, a considerably improved coupling reliability in the multiple-layered semiconductor device can be achieved.
1. A method for manufacturing a multiple-layered semiconductor device having a multiple-layered structure including stacked two or more semiconductor packages, comprising:
installing a semiconductor device on a substrate including a coupling land that is provided in a first semiconductor package, said first semiconductor package being disposed in a layer other than a top layer in the multiple-layered structure;
forming a resin on said substrate around said semiconductor device;
forming a plurality of openings extending from an upper surface of said resin to said coupling land;
forming a second semiconductor package with plural electric conductors projecting from a lower surface;
after forming the second semiconductor package, stacking and coupling the second semiconductor package onto said first semiconductor package by inserting the projecting electric conductors into respective ones of said openings; and
after inserting the projecting electric conductors into respective ones of said openings, melting the electric conductors,
wherein said stacking and coupling the second semiconductor package onto said first semiconductor package includes adhering an upper surface of said first semiconductor package to the lower surface of said second semiconductor package via an adhesive agent.
2. The method for manufacturing the multiple-layered semiconductor device as set forth in claim 1 , wherein said stacking and coupling the second semiconductor package onto said first semiconductor package includes applying said adhesive agent on regions in the lower surface said second semiconductor package except regions where said electric conductor is formed.
3. A method for manufacturing a multiple-layered semiconductor device having a multiple-layered structure including stacked two or more semiconductor packages, comprising:
installing a semiconductor device on a substrate including a coupling land that is provided in a first semiconductor package, said first semiconductor package being disposed in a layer other than a top layer in the multiple-layered structure;
forming a resin on said substrate around said semiconductor device;
forming a plurality of openings extending from an upper surface of said resin to said coupling land;
forming a second semiconductor package with plural electric conductors projecting from a lower surface;
after forming the second semiconductor package, stacking and coupling the second semiconductor package onto said first semiconductor package by inserting the projecting electric conductors into respective ones of said openings; and
after inserting the projecting electric conductors into respective ones of said openings, melting the electric conductors,
wherein said stacking and coupling the second semiconductor package onto said first semiconductor package includes forming a film having a heat-releasing function on a back surface of said semiconductor device of said first semiconductor package that is flip-chip coupled thereto.
4. The method for manufacturing the multiple-layered semiconductor device as set forth in claim 3 , wherein said film having a heat-releasing function is a heat-releasing paste.