Color filter structure having inorganic layers
A color filter structure includes a substrate, in which a number of first pixel regions, a number of second pixel regions, and a number of third pixel regions are defined on the substrate. Each first pixel region includes a first stack layer; each second pixel region includes a second stack layer; and each third pixel region includes the first stack layer and the second stack layer.
1. A color filter structure, comprising:
a substrate, wherein a plurality of first pixel regions, a plurality of second pixel regions, and a plurality of third pixel regions are defined on the substrate;
each first pixel region comprising a first stack layer, and each first stack layer comprising a plurality of first inorganic layer, a plurality of second inorganic layer, and a plurality of third inorganic layer, wherein the first inorganic layer, the second inorganic layer and the third inorganic layer comprise different inorganic materials;
each second pixel region comprising a second stack layer; and
each third pixel region comprising the first stack layer and the second stack layer.
2. The structure of claim 1 , wherein in each of the first stack layer, each second inorganic layer and each third inorganic layer are alternately stacked comprising a total stack count of four to eight to form an alternately stacked structure.
3. The structure of claim 1 , wherein each first inorganic layer comprising a silicon nitride layer, each second inorganic layer comprising a silicon oxide layer, and each third inorganic layer comprising a silicon-oxy-nitride layer.
4. The structure of claim 1 , wherein each first pixel region further comprises a silicon oxide layer disposed between the substrate and each first stack layer.