Semiconductor phase change memory using multiple phase change layers
View Patent ↗In accordance with some embodiments, a phase change memory may be formed in which the thermal conductivity in the region outside the programmed volume of phase change material is reduced. This may reduce the power consumption of the resulting phase change memory. The reduction in power consumption may be achieved by forming distinct layers of phase change material that have little or no mixing between them outside the programmed volume. For example, in one embodiment, a diffusion barrier layer may be maintained between the two distinct phase change layers. In another embodiment, a face centered cubic chalcogenide structure may be utilized.
1. A phase change memory comprising:
a first electrode;
a second electrode;
a first phase change layer formed between said first and second electrodes wherein said first phase change layer contacts said first electrode and said second electrode; and
a second phase change layer formed between said first and second electrodes.
2. The memory of claim 1 wherein said second phase change layer contacts said first electrode and does not contact said second electrode.
3. The memory of claim 1 wherein said first phase change layer completely covers said first electrode.
4. The memory of claim 1 further including an insulator formed between said first and second electrodes and a pore formed in said insulator, said first and second phase change layers being formed in said pore.
5. The memory of claim 4 wherein said first phase change layer lines said pore.
6. The memory of claim 5 wherein said second phase change layer lines said first layer.