Semiconductor apparatus and method of manufacturing the same
View Patent ↗A vertical power MOSFET includes a semiconductor substrate including a trench, a gate electrode layer having a prescribed impurity concentration and being formed inside the trench, and a cap insulating layer having a lower impurity concentration than the impurity concentration of the gate electrode layer and covering the gate electrode layer to provide insulation.
1. A semiconductor apparatus comprising:
a semiconductor substrate including a trench;
a gate electrode layer having a prescribed impurity concentration and being formed inside the trench;
a source layer formed inside the semiconductor substrate and formed around the trench;
a source electrode formed on a front surface of the substrate; and
a cap insulating layer formed on the gate electrode layer and in an area which corresponds to an area where the gate electrode layer is formed such that the source layer and the source electrode are in direct contact with each other,
wherein the cap insulating layer has a lower impurity concentration than the impurity concentration of the gate electrode layer, and at least a portion of the cap insulating layer is formed in the trench, and
wherein the cap insulating layer comprises:
a glass film formed in the trench on the gate insulating film and including a depressed portion; and
an oxide layer formed in the trench on the depressed portion of the glass film.
2. The semiconductor apparatus according to claim 1 , wherein the gate electrode layer comprises a polysilicon film.
3. The semiconductor apparatus according to claim 1 , wherein the cap insulating layer comprises a lamination of an NSG (Non-doped Silica Glass) layer or an HTO (High Temperature Oxide) layer and a polysilicon oxide film.
4. The semiconductor apparatus according to claim 1 , wherein the impurity concentration of the cap insulating layer is one hundredth or below of the impurity concentration of the gate electrode layer.
5. The semiconductor apparatus according to claim 1 , wherein the semiconductor apparatus comprises a vertical MOSFET.
6. The semiconductor apparatus according to claim 1 , further comprising:
a gate insulating film formed on a wall of the trench, the gate electrode layer being formed on the gate insulating film,
wherein the source layer is in contact with said gate insulating film.
7. The semiconductor apparatus according to claim 6 , wherein a height of an upper surface of the gate electrode layer is greater than a height of a lower surface of the source layer.
8. The semiconductor apparatus according to claim 6 , wherein the
oxide layer projects above a surface of the substrate.
9. The semiconductor apparatus according to claim 8 , wherein the oxide layer comprises a thermal oxide layer.
10. The semiconductor apparatus according to claim 1 , wherein a height of an upper surface of the gate electrode layer is less than a height of a surface of the substrate.
11. The semiconductor apparatus according to claim 1 , wherein a height of an upper surface of the cap insulating layer is greater than a height of an upper surface of the substrate, and the source electrode is formed on the cap insulating layer.
12. The semiconductor apparatus according to claim 1 , wherein a height of a lower surface of the cap insulating layer is less than a height of an upper surface of the substrate.
13. The semiconductor apparatus according to claim 1 , wherein the cap insulating layer is not formed over the source layer.
14. The semiconductor apparatus according to claim 1 , wherein the cap insulating layer is directly interposed between the gate electrode layer and the source electrode.