Method to manufacture a phase change memory
View Patent ↗Briefly, in accordance with an embodiment of the invention, a method to manufacture a phase change memory is provided. The method may include forming a first electrode contacting the sidewall surface and the bottom surface of the phase change material. The method may further include forming a second electrode contacting the top surface of the phase change material.
1. A method comprising:
forming a pore in an insulator, said pore having a sidewall and a bottom wall;
forming a first cup-shaped electrode covering said insulator and coating said sidewall and bottom wall of said pore to form a coated pore;
forming a second cup-shaped electrode in said pore over said first cup-shaped electrode, said first and second cup-shaped electrodes being coupled electrically; and
forming a phase change material, that is able to be electrically switched between a generally amorphous and a generally crystalline state, over said second cup-shaped electrode, the bottom and lateral surfaces of said phase change material entirely contained within said second cup-shaped electrode.
2. The method of claim 1 including forming said first cup-shaped electrode having an opening that is less than about 2500 Angstroms.
3. The method of claim 2 including forming said phase change material on said first cup-shaped electrode.
4. The method of claim 3 including filling said first cup-shaped electrode with the phase change material.
5. The method of claim 1 including forming an insulator over said first cup- shaped electrode.
6. The method of claim 5 including forming a third cup-shaped electrode in said pore over said second cup-shaped electrode.
7. The method of claim 6 including forming a third cup-shaped electrode having a higher resistivity than said second cup-shaped electrode.
8. The method of claim 7 including depositing said phase change material over said third cup-shaped electrode.