Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device
View Patent ↗The present invention relates to a method for producing an n-type ZnTe system compound semiconductor single crystal having high carrier concentration and low resistivity, the ZnTe system compound semiconductor single crystal, and a semiconductor device produced by using the ZnTe system compound semiconductor as a base member. Concretely, a first dopant and a second dopant are co-doped into the ZnTe system compound semiconductor single crystal so that the number of atoms of the second dopant becomes smaller than the number of atoms of the first dopant, the first dopant being for controlling a conductivity type of the ZnTe system compound semiconductor to a first conductivity type, and the second dopant being for controlling the conductivity type to a second conductivity type different from the first conductivity type. By the present invention, a desired carrier concentration can be achieved with a doping amount smaller than in earlier technology, and crystallinity of the obtained crystal can be improved.
1. A method for producing a ZnTe system compound semiconductor singe crystal, comprising:
co-doping a first dopant and a second dopant into the ZnTe system compound semiconductor single crystal so that a number of atoms of the second dopant becomes smaller than a number of atoms of the first dopant, the first dopant being for controlling a conductivity type of the ZnTe system compound semiconductor to n-type and comprising a Group 17 (7B) element, and the second dopant being for controlling the conductivity type to p-type and comprising a Group 1 (1A) element, when performing epitaxial growth of the ZnTe system compound semiconductor single crystal on a substrate.
2. The method for producing the ZnTe system compound semiconductor single crystal as claimed in claim 1 , wherein the Group 17 (7B) element includes at least one of Cl, Br and I, and the Group 1 (1A) element includes at least Li.
3. The method for producing the ZnTe system compound semiconductor single crystal as claimed in claim 1 , wherein the substrate is a ZnTe substrate.
4. The method for producing the ZnTe system compound semiconductor single crystal as claimed in claim 2 , wherein the substrate is a ZnTe substrate.