Light emitting diode
At an upper part of au AIGaInP based compound semiconductor layer including an active layer 14 sandwiched by a lower cladding layer 13 and an upper cladding layer 15 , a circular electrode 19 for wire bonding and cross-shaped branch electrodes 18 for current spreading connected to the circular electrode 19 arc formed. A contact electrode 17 for current injection is connected to the branch electrodes 18 for current spreading. An interface contact electrode 12 for current injection is provided under the AIGaInP based compound semiconductor layer. A light reflection mirror layer 10 is provided under the interface contact electrode 12 for current injection. The interface contact electrode 12 for current injection is provided right under an outer periphery of the electrode 19 for wire bonding or under a region in vicinity of the outer periphery of the electrode 19 for wire bonding.
1. A light emitting diode, comprising:
a compound semiconductor layer including an active layer;
a conductive substrate bonded to the compound semiconductor layer;
a first current blocking layer comprising a transparent insulating film provided on the compound semiconductor layer;
a first electrode provided on the first current blocking layer, the first electrode comprising a pad electrode and a current spreading electrode extending from the pad electrode;
a second current blocking layer comprising a transparent insulating film provided between the active layer and the conductive substrate;
a light reflection mirror layer provided between the active layer and the conductive substrate;
a second electrode passing through the second current blocking layer, the second electrode being provided only in a region overlapping the pad electrode in a top view; and
a third electrode passing through the first current blocking layer, the third electrode electrically connecting the current spreading electrode to the compound semiconductor layer.
2. The light emitting diode according to claim 1 , wherein the compound semiconductor layer comprises an AIGaInP based compound semiconductor.
3. The light emitting diode according to claim 1 , wherein the compound semiconductor layer comprises an AIGaInN based compound semiconductor.
4. The light emitting diode according to claim 1 , wherein the compound semiconductor layer comprises an irregular surface in a region other than a region overlapping the first electrode in the top view.
5. The light emitting diode according to claim 1 , wherein the current spreading electrode extending radially from the pad electrode.
6. The light emitting diode according to claim 1 , further comprising:
a back side electrode provided at a back side surface of the conductive substrate, the back side surface being opposite to the first electrode with respect to the compound semiconductor layer.
7. The light emitting diode according to claim 1 , wherein the second electrode comprises Au-based material.
8. The light emitting diode according to claim 1 , wherein the second electrode comprises an annular shape.
9. The light emitting diode according to claim 1 , wherein the current spreading electrode comprises a transparent electrode.
10. The light emitting diode according to claim 1 , wherein the third electrode overlaps the current spreading electrode in the top view.
11. The light emitting diode according to claim 1 , wherein the pad electrode comprises a circular shape.