Fabrication method of micro-lens and fabrication method of master for micro-lens
View Patent ↗A method of fabricating a micro lens, the method including: forming a photo-sensitive film on a substrate; placing a photo mask at a predetermined distance from a top of the photo-sensitive film; exposing the photo-sensitive film by varying an area of exposure of the photo-sensitive film so as to selectively expose three-dimensional structures of the photo-sensitive film corresponding to desired micro lenses; and developing the photo-sensitive film such that the exposed three-dimensional structures remain. Also, there is provided a method of fabricating a master for a micro lens, in which a master material is applied on the photo-sensitive film with the three-dimensional structures to form a master having the three-dimensional structures transferred thereonto.
1. A method of fabricating a micro lens, the method comprising:
forming a photo-sensitive film on a substrate;
placing a photo mask at a predetermined distance from a top of the photo-sensitive film;
exposing the photo-sensitive film by varying an area of exposure of the photo-sensitive film so as to selectively expose three-dimensional structures of the photo-sensitive film corresponding to desired micro lenses; and
developing the photo-sensitive film such that the exposed three-dimensional structures remain,
wherein the area of exposure of the photo-sensitive film is varied by adjusting a distance between the photo mask and the photo-sensitive film, and
wherein the exposing the photo-sensitive film comprises
exposing the photo-sensitive film after the placing a photo mask at a predetermined distance from a top of the photo-sensitive film,
temporarily stopping the exposing and moving the photo mask in a vertical direction such that the distance is changed, and
additionally exposing the photo-sensitive film using the moved photo mask.
2. The method of claim 1 , wherein the moving the photo mask in a vertical direction and the additionally exposing the photo-sensitive film are repeated at least once.
3. The method of claim 1 , further comprising transferring the three-dimensional structures onto the substrate by etching the photo-sensitive film of the remaining three-dimensional structures and the substrate simultaneously, after the developing the photo-sensitive film.
4. The method of claim 1 , wherein the three-dimensional structures are one of prism structures and pyramid structures.
5. A method of fabricating a master for a micro lens, the method comprising:
forming a photo-sensitive film on a substrate;
placing a photo mask at a predetermined distance from a top of the photo-sensitive film;
exposing the photo-sensitive film by varying an area of exposure of the photo-sensitive film so as to selectively expose three-dimensional structures of the photo-sensitive film corresponding to desired micro lenses;
developing the photo-sensitive film such that the exposed three-dimensional structures remain; and
forming a master having the three-dimensional structures transferred thereonto by applying a master material on the photo-sensitive film with the three-dimensional structures,
wherein the area of exposure of the photo-sensitive film is varied by adjustinq a distance between the photo mask and the photo-sensitive film, and
wherein the exposing the photo-sensitive film comprises
exposing the photo-sensitive film after the placing a photo mask at a predetermined distance from a top of the photo-sensitive film,
temporarily stopping the exposing and moving the photo mask in a vertical direction such that the distance is changed, and
additionally exposing the photo-sensitive film using the moved photo mask.
6. The method of claim 5 , wherein the moving the photo mask in a vertical direction and the additionally exposing the photo-sensitive film are repeated at least once.
7. The method of claim 5 , wherein the master material is one of a curing resin and a metal.
8. The method of claim 5 , wherein the three-dimensional structures are one of prism structures and pyramid structures.