Resin for sealing semiconductor device, resin-sealed semiconductor device and the method of manufacturing the semiconductor device
View Patent ↗A resin sealed semiconductor device includes a semiconductor chip having a main surface, a plurality of surface electrodes formed on the main surface of the chip, a plurality of projection electrodes formed the main surface, each projection electrode being connected to respective one surface electrodes, and a resin shield covering the main surface, the surface electrodes and side surfaces of the projection electrodes, the resin having a thermal expansion coefficient in the range of 8-10 ppm/° C. and a Young's modulus in the range of 1.8-2.0 Gpa.
1. A method of forming a resin-sealed semiconductor device, comprising:
preparing a semiconductor wafer having a main surface and a back surface opposite to the main surface, the semiconductor wafer having projection electrodes formed on the main surface;
placing the semiconductor wafer in a molding apparatus including an upper mold and a lower mold, wherein the lower mold includes a concave portion for placing the semiconductor wafer, a diameter of the concave portion being substantially identical to that of the semiconductor wafer, and wherein the main surface of the semiconductor wafer faces toward a bottom of the concave portion; and
injecting resin material between the main surface of the semiconductor wafer and the bottom of the concave portion for sealing the main surface of the semiconductor wafer.
2. The method of forming a resin-sealed semiconductor device as claimed in claim 1 , wherein the lower mold further includes a runner portion, which is connected to the concave portion so that the resin material is injected on the main surface of the semiconductor wafer via the runner portion.
3. The method of forming a resin-sealed semiconductor device as claimed in claim 1 , wherein the resin material is injected from a peripheral area of the semiconductor wafer.
4. The method of forming a resin-sealed semiconductor device as claimed in claim 1 , wherein the resin is injected at a center area of the semiconductor wafer.
5. The method of forming a resin-sealed semiconductor device as claimed in claim 1 , further comprising:
ejecting the semiconductor wafer from the molding apparatus by using a ring-shaped ejector, which is placed under the concave of the lower mold.
6. The method of forming a resin-sealed semiconductor device as claimed in claim 1 , wherein the resin material seals only the main surface, but not a side, of the semiconductor wafer.