Method for fabricating polysilicon layer with large and uniform grains
An exemplary method for fabricating a polysilicon layer ( 208 ) includes the following steps. A substrate ( 200 ) is provided, and a first amorphous silicon layer ( 203 ) is formed over the substrate. Portions of the first amorphous silicon layer are removed through a photolithograph process to form a plurality of crystallization seeds ( 205 ). A second amorphous silicon layer ( 206 ) is formed over the substrate and the crystallization seeds. A laser annealing process is conducted to crystallize the amorphous silicon layer into a polysilicon layer.
1 . A method for fabricating a polysilicon layer, the method comprising:
providing a substrate, and forming a first amorphous silicon layer over the substrate;
removing portions of the first amorphous silicon layer to form a plurality of crystallization seeds through a photolithographic process;
forming a second amorphous silicon layer over the substrate, the second amorphous silicon layer covering the crystallization seeds; and
conducting a laser annealing process to crystallize the amorphous silicon layer into a polysilicon layer.
2 . The method for fabricating a polysilicon layer as claimed in claim 1 , wherein the portions of the first amorphous silicon layer are removed via a dry etching process.
3 . The method for fabricating a polysilicon layer as claimed in claim 2 , wherein an etchant of the dry etching process is a mixture of sulfur hexafluoride and carbon tetrafluoride.
4 . The method for fabricating a polysilicon layer as claimed in claim 1 , wherein the portions of the first amorphous silicon layer are removed via a wet etching process.
5 . The method for fabricating a polysilicon layer as claimed in claim 4 , wherein an etchant of the wet etching process is an aqueous solution of nitric acid and ammonium fluoride.
6 . The method for fabricating a polysilicon layer as claimed in claim 1 , wherein each two adjacent crystallization seeds are spaced apart a distance in the range from 0.5 micrometers-to 3 micrometers.
7 . The method for fabricating a polysilicon layer as claimed in claim 6 , wherein each two adjacent crystallization seeds are spaced apart a distance of 2 micrometers.
8 . The method for fabricating a polysilicon layer as claimed in claim 1 , wherein the substrate is a glass substrate.
9 . The method for fabricating a polysilicon layer as claimed in claim 1 , wherein the first and second amorphous silicon layers are each formed by a process selected from the group consisting of vacuum evaporation, sputtering, low pressure chemical vapor deposition, and plasma enhanced chemical vapor deposition.
10 . The method for fabricating a polysilicon layer as claimed in claim 1 , further comprising, before forming the first amorphous silicon layer, forming a buffer layer on the substrate, with the first amorphous silicon layer being subsequently formed on the buffer layer.
11 . The method for fabricating a polysilicon layer as claimed in claim 10 , wherein the buffer layer is one of a silicon oxide layer and a silicon nitride layer.
12 . The method for fabricating a polysilicon layer as claimed in claim 10 , wherein the buffer layer is a multilayer having at least one silicon nitride layer and at least one silicon oxide layer.
13 . The method for fabricating a polysilicon layer as claimed in claim 1 , further comprising planarizing the polysilicon layer.
14 . The method for fabricating a polysilicon layer as claimed in claim 13 , wherein the polysilicon layer is planarized by a process selected from the group consisting of plasma etching, chemical mechanical polishing, chemical wet etching, and excimer laser annealing.
15 . A method for fabricating a polysilicon layer, the method comprising:
providing a substrate, and forming a first amorphous silicon layer over the substrate;
etching the first amorphous silicon layer to form a plurality of silicon particles;
forming a second amorphous silicon layer over the substrate, the second amorphous silicon layer covering the silicon particles; and
melting the second amorphous silicon layer and crystallizing the melted silicon into a polysilicon layer, wherein the silicon particles act as crystallization seeds.
16 . The method for fabricating a polysilicon layer as claimed in claim 15 , wherein the silicon particles are formed through a photolithographic process.
17 . The method for fabricating a polysilicon layer as claimed in claim 15 , wherein the second amorphous silicon layer is crystallized through an excimer laser annealing process.
18 . The method for fabricating a polysilicon layer as claimed in claim 15 , further comprising, before forming the first amorphous silicon layer, forming a buffer layer on the substrate, with the first amorphous silicon layer being subsequently formed on the buffer layer.
19 . The method for fabricating a polysilicon layer as claimed in claim 15 , further comprising planarizing the polysilicon layer.