IP Library Granted Patent US 7,894,246
Granted Patent B2
US 7,894,246 · App. 12/014,522 · Granted Feb 22, 2011

Magnetoresistive element and magnetic memory

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Quick Facts
Patent No.
US 7,894,246
App. No.
12/014,522
Granted
Feb 22, 2011
Kind
B2
Abstract

A magnetoresistive element includes: a magnetization free layer having a first plane and a second plane located on the opposite side from the first plane, and having a variable magnetization direction; a magnetization pinned layer provided on the first plane side of the magnetization free layer, and having a pinned magnetization direction; a first tunnel barrier layer provided between the magnetization free layer and the magnetization pinned layer; a second tunnel barrier layer provided on the second plane of the magnetization free layer; and a non-magnetic layer provided on a plane on the opposite side of the second tunnel barrier layer from the magnetization free layer. The magnetization direction of the magnetization free layer is variable by applying current between the magnetization pinned layer and the non-magnetic layer, and a resistance ratio between the first tunnel barrier layer and the second tunnel barrier layer is in a range of 1:0.25 to 1:4.

Claims (62)

1. A magnetoresistive element comprising:

a magnetization free layer having a first plane and a second plane located on the opposite side from the first plane, and having a variable magnetization direction;

a magnetization pinned layer provided on the first plane side of the magnetization free layer, and having a pinned magnetization direction;

a first tunnel barrier layer provided between the magnetization free layer and the magnetization pinned layer;

a second tunnel barrier layer provided on the second plane of the magnetization free layer; and

a non-magnetic layer provided on a plane on the opposite side of the second tunnel barrier layer from the magnetization free layer,

the magnetization direction of the magnetization free layer being variable by applying current between the magnetization pinned layer and the non-magnetic layer,

a resistance ratio between the first tunnel barrier layer and the second tunnel barrier layer being in a range of 1:0.25 to 1:4,

wherein the magnetization free layer includes a first soft magnetic layer provided on a side of the first tunnel barrier layer, and a second soft magnetic layer provided on a side of the second tunnel barrier layer, the second soft magnetic layer having a smaller film plane area than the first soft magnetic layer.

2. The element according to claim 1 , wherein the second tunnel barrier layer is made of MgO oriented in the <100> direction.

3. The element according to claim 1 , wherein the first tunnel barrier layer is made of MgO oriented in the <100> direction.

4. The element according to claim 1 , wherein the magnetization directions of the magnetization pinned layer and the magnetization free layer are parallel to the first plane.

5. The element according to claim 1 , further comprising an antiferromagnetic layer that is located on the opposite side of the magnetization pinned layer from the first tunnel barrier layer, and pins the magnetization direction of the magnetization pinned layer.

6. The element according to claim 1 , wherein the magnetization directions of the magnetization pinned layer and the magnetization free layer are perpendicular to the first plane.

7. A magnetic memory comprising:

a magnetoresistive element according to claim 1 ;

a first wiring line connected to one end of the magnetoresistive element; and

a second wiring line connected to the other end of the magnetoresistive element.

8. The memory according to claim 7 , further comprising a selective transistor that is provided between the other end of the magnetoresistive element and the second wiring line.

9. The memory according to claim 8 , further comprising a connecting unit that is provided between the other end of the magnetoresistive element and the selective transistor, and extends perpendicularly to the first plane,

wherein a straight line that connects the center of the magnetization free layer and the center of the connecting unit is tilted with respect to the magnetization direction of the magnetization pinned layer when the magnetoresistive element is projected on a plane parallel to the first plane of the magnetization free layer.

10. The memory according to claim 9 , wherein the straight line is tilted at an angle of 45 degrees or less with respect to the magnetization direction of the magnetization pinned layer.

11. A magnetoresistive element comprising:

a magnetization free layer having a first plane and a second plane located on the opposite side from the first plane, and having a variable magnetization direction;

a magnetization pinned layer provided on the first plane side of the magnetization free layer, and having a pinned magnetization direction;

a first tunnel barrier layer provided between the magnetization free layer and the magnetization pinned layer;

a second tunnel barrier layer provided on the second plane of the magnetization free layer; and

a non-magnetic layer provided on a plane on the opposite side of the second tunnel barrier layer from the magnetization free layer,

the magnetization direction of the magnetization free layer being variable by applying current between the magnetization pinned layer and the non-magnetic layer,

a resistance ratio between the first tunnel barrier layer and the second tunnel barrier layer being in a range of 1:0.25 to 1:4,

wherein the magnetization free layer includes a first soft magnetic layer provided on a side of the first tunnel barrier layer, and a second soft magnetic layer provided on a side of the second tunnel barrier layer, the second soft magnetic layer being shorter in a hard magnetization direction than the first soft magnetic layer.

12. A magnetoresistive element comprising:

a magnetization free layer having a first plane and a second plane located on the opposite side from the first plane, and having a variable magnetization direction;

a magnetization pinned layer provided on the first plane side of the magnetization free layer, and having a pinned magnetization direction;

a first tunnel barrier layer provided between the magnetization free layer and the magnetization pinned layer;

a second tunnel barrier layer provided on the second plane of the magnetization free layer; and

a non-magnetic layer provided on a plane on the opposite side of the second tunnel barrier layer from the magnetization free layer,

the magnetization direction of the magnetization free layer being variable by applying current between the magnetization pinned layer and the non-magnetic layer,

a difference in film thickness between the second tunnel barrier layer and the first tunnel barrier layer being 0.14 nm or smaller, when the first tunnel barrier layer and the second tunnel barrier layer are made of the same material and have tunnel junctions having the same areas as each other,

wherein the magnetization free layer includes a first soft magnetic layer provided on a side of the first tunnel barrier layer, and a second soft magnetic layer provided on a side of the second tunnel barrier layer, the second soft magnetic layer having a smaller film plane area than the first soft magnetic layer.

13. The element according to claim 12 , wherein the second tunnel barrier layer is made of MgO oriented in the <100> direction.

14. The element according to claim 12 , wherein the first tunnel barrier layer is made of MgO oriented in the <100> direction.

15. The element according to claim 12 , wherein the magnetization directions of the magnetization pinned layer and the magnetization free layer are parallel to the first plane.

16. The element according to claim 12 , further comprising an antiferromagnetic layer that is located on the opposite side of the magnetization pinned layer from the first tunnel barrier layer, and pins the magnetization direction of the magnetization pinned layer.

17. The element according to claim 12 , wherein the magnetization directions of the magnetization pinned layer and the magnetization free layer are perpendicular to the first plane.

18. A magnetic memory comprising:

a magnetoresistive element according to claim 12 ;

a first wiring line connected to one end of the magnetoresistive element; and

a second wiring line connected to the other end of the magnetoresistive element.

19. The memory according to claim 18 , further comprising a selective transistor that is provided between the other end of the magnetoresistive element and the second wiring line.

20. The memory according to claim 19 , further comprising a connecting unit that is provided between the other end of the magnetoresistive element and the selective transistor, and extends perpendicularly to the first plane,

wherein a straight line that connects the center of the magnetization free layer and the center of the connecting unit is tilted with respect to the magnetization direction of the magnetization pinned layer when the magnetoresistive element is projected on a plane parallel to the first plane of the magnetization free layer.

21. The memory according to claim 20 , wherein the straight line is tilted at an angle of 45 degrees or less with respect to the magnetization direction of the magnetization pinned layer.

22. A magnetoresistive element comprising:

a magnetization free layer having a first plane and a second plane located on the opposite side from the first plane, and having a variable magnetization direction;

a magnetization pinned layer provided on the first plane side of the magnetization free layer, and having a pinned magnetization direction;

a first tunnel barrier layer provided between the magnetization free layer and the magnetization pinned layer;

a second tunnel barrier layer provided on the second plane of the magnetization free layer; and

a non-magnetic layer provided on a plane on the opposite side of the second tunnel barrier layer from the magnetization free layer,

the magnetization direction of the magnetization free layer being variable by applying current between the magnetization pinned layer and the non-magnetic layer,

a difference in film thickness between the second tunnel barrier layer and the first tunnel barrier layer being 0.14 nm or smaller, when the first tunnel barrier layer and the second tunnel barrier layer are made of the same material and have tunnel junctions having the same areas as each other,

wherein the magnetization free layer includes a first soft magnetic layer provided on a side of the first tunnel barrier layer, and a second soft magnetic layer provided on a side of the second tunnel barrier layer, the second soft magnetic layer being shorter in a hard magnetization direction than the first soft magnetic layer.

Assignments (4)
DE-MERGER Recorded Dec 12, 2019
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 051260/0291 →
MERGER Recorded Dec 12, 2019
From: TOSHIBA MEMORY CORPORATION; K.K PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 051262/0776 →
CHANGE OF NAME AND ADDRESS Recorded Dec 12, 2019
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 051262/0881 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 7, 2008
From: UEDA, TOMOMASA; AIKAWA, HISANORI; YOSHIKAWA, MASATOSHI; SHIMOMURA, NAOHARU; NAKAYAMA, MASAHIKO; IKEGAWA, SUMIO; HOSOTANI, KEIJI; NAGAMINE, MAKOTO
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 020764/0927 →