Electronic assemblies providing active side heat pumping
View Patent ↗An electronic assembly may include a packaging substrate, an integrated circuit (IC) semiconductor chip, a plurality of metal interconnection structures, and a thermoelectric heat pump. The integrated circuit (IC) semiconductor chip may have an active side including input/output pads thereon and a back side opposite the active side, and the IC semiconductor chip may be arranged with the active side facing the first surface of the packaging substrate. The plurality of metal interconnection structures may be between the active side of the IC semiconductor chip and the first surface of the packaging substrate, and the plurality of metal interconnection structures may provide mechanical connection between the active side of the IC semiconductor chip and the first surface of the packaging substrate. The thermoelectric heat pump may be coupled to the packaging substrate with the thermoelectric heat pump being configured to actively pump heat between the IC semiconductor chip and the packaging substrate. Related methods and structures are also discussed.
1. An electronic assembly comprising:
a packaging substrate having opposing first and second surfaces;
an integrated circuit (IC) semiconductor chip having an active side including input/output pads thereon and a back side opposite the active side, wherein the IC semiconductor chip is arranged with the active side facing the first surface of the packaging substrate;
a plurality of metal interconnection structures between the active side of the IC semiconductor chip and the first surface of the packaging substrate, wherein the plurality of metal interconnection structures provide mechanical connection between the active side of the IC semiconductor chip and the first surface of the packaging substrate; and
a thermoelectric heat pump coupled to the packaging substrate, wherein the thermoelectric heat pump is configured to actively pump heat between the IC semiconductor chip and the packaging substrate,
wherein the thermoelectric heat pump is between the packaging substrate and the IC semiconductor chip, wherein the thermoelectric heat pump comprises an n-type thermoelectric element electrically coupled to a first one of the metal interconnection structures and a p-type thermoelectric element electrically coupled to a second one of the metal interconnection structures, wherein the IC semiconductor chip includes an electrically conductive coupling between the first and second metal interconnection structures so that the n-type and p-type thermoelectric elements and the first and second metal interconnection structures are electrically coupled in series, wherein the n-type and p-type thermoelectric elements are thermally coupled in parallel between the IC semiconductor chip and the packaging substrate, wherein a third one of the metal interconnection structures is electrically coupled between an electronic circuit of the IC semiconductor chip and an electrically conductive trace of the packaging substrate, wherein the third metal interconnection structure is free of thermoelectric material, and wherein each of the first, second, and third metal interconnection structures includes a copper pillar and a solder material;
wherein the packaging substrate includes a thermally conductive via between the first and second surfaces thereof, and wherein the thermally conductive via, and the first metal interconnection structure are thermally coupled in series between the active side of the IC semiconductor chip and the second surface of the packaging substrate;
wherein the thermally conductive via is adjacent the first metal interconnection structure and spaced apart from the second metal interconnection structure in a direction that is parallel with respect to a surface of the packaging substrate.
2. An electronic assembly according to claim 1 wherein the packaging substrate includes a thermally conductive via between the first and second surfaces thereof, wherein at least a portion of the thermoelectric heat pump is between the thermally conductive via and the IC semiconductor chip.
3. An electronic assembly according to claim 1 further comprising:
a heat dissipating structure thermally coupled to the thermoelectric heat pump, wherein the packaging substrate is between the IC semiconductor chip and the heat dissipating structure.
4. An electronic assembly according to claim 1 wherein the third metal interconnection structures provides electrical coupling between a circuit of the IC semiconductor chip and an electrically conductive trace of the packaging substrate.
5. An electronic assembly according to claim 1 wherein the packaging substrate comprises a thermally conductive packaging substrate.
6. An electronic assembly according to claim 1 wherein the thermally conductive via and the first metal interconnection structure are aligned in the direction parallel with respect to the surface of the packaging substrate.
7. An electronic assembly comprising:
a packaging substrate;
an integrated circuit (IC) semiconductor chip having an active side including input/output pads thereon, wherein the IC semiconductor chip is arranged with the active side facing the packaging substrate; and
a plurality of metal interconnection structures between the IC semiconductor chip and the packaging substrate, wherein a first metal interconnection structure includes a thermoelectric material, and wherein a second metal interconnection structure is free of thermoelectric material;
wherein the packaging substrate includes a thermally conductive via therethrough adjacent at least one of the metal interconnection structures including thermoelectric material;
wherein the thermally conductive via is adjacent the first metal interconnection structure and spaced apart from the second metal interconnection structure in a direction that is parallel with respect to a surface of the packaging substrate.
8. An electronic assembly according to claim 7 wherein the thermally conductive via and the first metal interconnection structure are aligned in the direction parallel with respect to the surface of the packaging substrate.
9. An electronic assembly comprising:
a packaging substrate;
an integrated circuit (IC) semiconductor chip having an active side including input/output pads thereon, wherein the IC semiconductor chip is arranged with the active side facing the packaging substrate; and
a plurality of metal interconnection structures between the IC semiconductor chip and the packaging substrate, wherein a first metal interconnection structure includes a thermoelectric material, wherein a second metal interconnection structure is free of thermoelectric material, and
wherein each of the metal interconnection structures includes a respective copper pillar and a respective solder bond so that the first metal interconnection structure includes the thermoelectric material, the respective copper pillar, and the respective solder bond electrically coupled in series between the IC semiconductor chip and the packaging substrate;
wherein the packaging substrate includes a thermally conductive via therethrough adjacent at least one of the metal interconnection structures including thermoelectric material;
wherein the thermally conductive via is adjacent the first metal interconnection structure and spaced apart from the second metal interconnection structure in a direction that is parallel with respect to a surface of the packaging substrate.
10. An electronic assembly according to claim 9 wherein the first metal interconnection structure includes an N-type thermoelectric material, wherein a third metal interconnection structure includes a P-type thermoelectric material, and wherein the first and third metal interconnection structures are electrically coupled so that the N-type thermoelectric material and the P-type thermoelectric material are electrically coupled in series to define a thermoelectric P-N couple.
11. An electronic assembly according to claim 9 wherein the thermally conductive via and the first metal interconnection structure are aligned in the direction parallel with respect to the surface of the packaging substrate.