Immersion lithography objective
View Patent ↗An immersion lithography objective has a housing in which at least one first optical element is arranged, a second optical element, which follows the first optical element in the direction of the optical axis of the objective, an immersion medium that adjoins the second optical element being located downstream of the latter in the direction of the optical axis, and a retaining structure for the second optical element. The retaining structure has a greater stiffness in the direction of the optical axis than in a direction perpendicular to the optical axis.
1. An objective, comprising:
a first optical element;
a second optical element following the first optical element in a direction along an optical axis of the objective;
an immersion medium adjoining the second optical element and downstream of the second optical element in the direction along the optical axis of the objective; and
a retaining structure configured to retain the second optical element,
wherein a stiffness of the retaining structure in the direction along the optical axis of the objective is at least four times a stiffness of the retaining structure in a direction perpendicular to the optical axis, and the objective is an immersion lithography objective.
2. The objective of claim 1 , wherein the stiffness of the retaining structure in the direction along the optical axis is at least forty times the stiffness of the retaining structure in the direction perpendicular to the optical axis.
3. The objective of claim 1 , wherein the stiffness of the retaining structure in the direction along the optical axis is at least four hundred times the stiffness of the retaining structure in the direction perpendicular to the optical axis.
4. The objective of claim 1 , wherein the retaining structure has a stiffness of at least 10 7 N/m in the direction along the optical axis.
5. The objective of claim 1 , wherein the retaining structure has at least one decoupling element that is elastic in the direction perpendicular to the optical axis.
6. The objective of claim 5 , wherein at least a subregion of the retaining structure and the second optical element have different coefficients of thermal expansion, and the at least one elastic decoupling element is arranged in a region between the second optical element and the subregion of the retaining structure.
7. The objective of claim 5 , wherein the retaining structure has at least has three decoupling elements, each of the three decoupling elements being elastic in the direction perpendicular to the optical axis.
8. A machine, comprising:
an illumination system; and
the immersion lithography objective of claim 1 ,
wherein the machine is a projection exposure machine.
9. The machine of claim 8 , wherein the machine is configured to produce semiconductor components.
10. A method, comprising:
producing semiconductor components using the machine of claim 8 .