Method for manufacturing a structure of semiconductor-on-insulator type
View Patent ↗A method for manufacturing an insulated semiconductor layer, including: forming a porous silicon layer on a single-crystal silicon surface; depositing an insulating material so that it penetrates into the pores of the porous silicon layer; eliminating the insulating material to expose the upper surface of the porous silicon; and growing by epitaxy a semiconductor layer.
1. A method for manufacturing an insulated semiconductor layer, comprising:
forming a porous silicon layer on a single-crystal silicon surface;
depositing an insulating material different than silicon dioxide so that it penetrates into pores of the porous silicon layer;
removing at least some of the insulating material to expose at least one portion of the upper surface of the porous silicon; and
growing by epitaxy a semiconductor layer on the at least one portion of the upper surface of the porous silicon.
2. The method of claim 1 , wherein a material of the semiconductor layer is selected from a group consisting of silicon, germanium, and silicon-germanium.
3. The method of claim 1 , wherein the porous silicon layer is formed by electrochemical etching of the single-crystal silicon surface.
4. The method of claim 1 , wherein the insulating material is deposited by an ALD (Atomic Layer Deposition).
5. The method of claim 1 , where the porous silicon layer has a depth of approximately 500 nm.
6. The method of claim 1 , wherein the insulating material comprises HfO 2 .
7. A structure of semiconductor-on-insulator type comprising:
a semiconductor layer disposed on a porous silicon layer having pores filled with hafnium dioxide insulating material, the porous silicon layer disposed on single-crystal silicon.
8. The structure of claim 7 , wherein a material of the semiconductor layer is selected from a group consisting of silicon, germanium, and silicon-germanium.
9. The structure of claim 7 , wherein the insulating material comprises at least one material different from an oxide of the porous silicon layer.
10. The structure of semiconductor-on-insulator type of claim 7 formed at least at one selected location of a silicon wafer.
11. The structure of claim 7 , wherein the pores have dimensions of approximately 5 nm.
12. The structure of claim 7 , wherein the porous silicon layer has a depth of approximately 500 nm.
13. A structure of semiconductor-on-insulator type comprising:
a first porous semiconductor layer disposed on single-crystal semiconductor, the first porous semiconductor layer having pores with a non-native insulator deposited therein that increases an insulating characteristic of the first porous semiconductor layer; and
a second semiconductor layer disposed on a surface of the first porous semiconductor layer.
14. The structure of claim 13 , wherein the first porous semiconductor layer is a porous silicon layer and the single-crystal semiconductor is single-crystal silicon.
15. The structure of claim 14 formed at least at one selected region of a silicon wafer.
16. The structure of claim 14 , wherein the porous silicon layer having pores filled with the non-native insulator is heat resistant.
17. The structure of claim 14 , wherein the porous silicon layer having pores filled with the non-native insulator is acid resistant.
18. The structure of claim 13 , wherein the non-native insulator comprises at least one material different from an oxide of the first porous semiconductor layer.
19. A method for manufacturing an insulated semiconductor layer, comprising:
depositing a non-native insulator into pores of a first porous semiconductor layer; and
forming a second semiconductor layer on and in contact with the first porous semiconductor layer and the non-native insulator.
20. The method of claim 19 , wherein the first porous semiconductor layer is a porous silicon layer.
21. The method of claim 19 , wherein the insulator is capable of being deposited by an ALD (Atomic Layer Deposition) deposition method.
22. The method of claim 19 , wherein the insulator is capable of being deposited by a plasma-assisted deposition method under low-kinetics conditions.
23. The method of claim 19 , wherein the insulator is capable of being deposited by a CVD (Chemical Vapor Deposition) deposition method.
24. The method of claim 20 , wherein the porous silicon layer is formed by transforming an upper surface of a silicon wafer, at least at one selected location, into porous silicon.
25. The method of claim 19 , wherein the second semiconductor layer is formed by epitaxial growth.
26. The method of claim 19 further comprising, prior to forming the second semiconductor layer, removing at least some of the non-native insulator to expose at least one portion of the first porous semiconductor layer.
27. The method of claim 19 , wherein the non-native insulator comprises at least one material different from an oxide of the first porous semiconductor layer.