Substrate developing method and developing apparatus
A method for developing a substrate includes a developing step for supplying a developer to the substrate, and a neutralizing and removing step for supplying a treating solution containing a neutralizing material to the substrate to neutralize the developer, and neutralizing the developer and removing the developer from the substrate. In the neutralizing and removing step, the developer is neutralized by the treating solution. This neutralization reaction forms a product (salt) which easily melts into the treating solution and does not precipitate. Thus, the product is removable from the substrate along with the treating solution. Therefore, the developer is inhibited from remaining on the substrate. As a result, it is possible to prevent post-develop defects due to “residues of the developer” or the developer remaining on the substrate.
1. A method for developing a substrate, the method comprising:
supplying a developer to the substrate; and
supplying a treating solution including a neutralizing material to the substrate;
neutralizing the developer;
removing the developer from the substrate;
supplying a rinsing liquid to the substrate; and
scattering the rinsing liquid from the substrate by spinning the substrate, wherein supplying the rinsing liquid and scattering the rinsing liquid are performed after supplying the developer to the substrate and before supplying the treating solution.
2. The method of claim 1 wherein the treating solution comprises an acid.
3. The method of claim 1 wherein the neutralizing material includes at least one of carbon dioxide, hydrogen peroxide, or carboxylic acid.
4. The method of claim 1 wherein neutralizing the developer and removing the developer comprises spraying droplets of the treating solution on the substrate.
5. The method of claim 1 wherein the neutralizing the developer and removing the developer comprises supplying the treating solution to the substrate in a spin.
6. The method of claim 1 further comprising:
supplying a rinsing liquid to the substrate;
scattering the developer from the substrate by spinning the substrate, wherein
supplying a rinsing liquid and scattering the developer are performed after supplying a developer to the substrate and before supplying a treating solution.
7. The method of claim 1 further comprising scattering the developer from the substrate by spinning the substrate, wherein scattering the developer is performed after supplying a developer to the substrate and before supplying a treating solution.
8. The method of claim 1 wherein scattering the rinsing liquid is executed to dry the substrate.
9. A method for developing a substrate, the method comprising:
performing a developing step including supplying a developer to the substrate;
performing a neutralizing step including supplying a neutralizing material to the substrate to neutralize the developer;
performing a removing step including supplying a cleaning liquid to the substrate and removing a product formed by neutralization of the developer from the substrate; and
performing a rinsing step for supplying a rinsing liquid to the substrate and a first drying step for scattering the rinsing liquid from the substrate by spinning the substrate, wherein the rinsing step and the first drying step are performed after the developing step and before the neutralizing step.
10. The method of claim 9 wherein the neutralizing step is executed to direct carbon dioxide gas to the substrate.
11. The method of claim 9 wherein the first drying step is executed to dry the substrate.