Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
1 - 13 . (canceled)
14 . An apparatus for manufacturing a magnetic recording disk, comprising:
a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited onto a substrate;
a lubricant-layer preparation chamber in which a lubricant layer is prepared onto the substrate under a vacuum pressure; and
a transfer system that transfers the substrate from the magnetic-film deposition chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
15 . An apparatus for manufacturing a magnetic recording disk, comprising:
a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited onto a substrate;
a lubricant-layer preparation chamber in which a lubricant layer is prepared onto the substrate under a vacuum pressure after the magnetic film is deposited; and
a cleaning chamber in which the substrate is cleaned under a vacuum pressure alter deposition in the magnetic-film chamber and before preparation in the lubricant-layer chamber.
16 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 15 , further comprising
a gas introduction system introducing oxygen gas into the cleaning chamber, and
a power supply to form a plasma of introduced oxygen gas to oxidize contaminants adhering to the substrate into volatile oxides, thereby removing the contaminants.
17 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 16 , further comprising an electrode provided in the cleaning chamber, wherein the power supply applies an HF voltage to the electrode.
18 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 15 , further comprising a laser oscillator oscillating a laser beam to irradiate contaminants adhering to the substrate in the cleaning chamber, thereby removing the contaminants.
19 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 15 , further comprising a nozzle ejecting a gas toward the substrate in the cleaning chamber to blow away contaminants adhering to the substrate.
20 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 15 , further comprising a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
21 . An apparatus for manufacturing a magnetic recording disk, comprising:
a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited onto a substrate;
an overcoat deposition chamber in which an overcoat is deposited onto the substrate after the magnetic film is deposited;
a transfer system that transfers the substrate from the magnetic-film deposition chamber to the overcoat deposition chamber without exposing the substrate to the atmosphere;
a gas introduction system introducing oxygen gas into the overcoat deposition chamber; and
a power supply to form a plasma of introduced oxygen gas in the overcoat deposition chamber to oxidize contaminants adhering to the substrate into volatile oxides, thereby removing the contaminants.
22 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 21 , further comprising an electrode provided in the overcoat deposition chamber, wherein the power supply applies an HF voltage to the electrode.
23 . An apparatus for manufacturing a magnetic recording disk, comprising:
a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited onto a substrate; and
a burnishing chamber in which a burnishing is carried out under a vacuum pressure after the magnetic film is deposited, the burnishing being a step where protrusions on the substrate are removed.
24 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 23 , further comprising
a lubricant-layer preparation chamber in which a lubricant layer is prepared onto the substrate after the burnishing, and
a transfer system that transfers the substrate from the burnishing chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
25 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 23 , further comprising
a burnishing tape that is rubbed the substrate with in the burnishing chamber, and
a means for cleaning a surface of the burnishing tape prior to the burnishing.
26 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 23 , further comprising
a burnishing tape that is rubbed the substrate with in the burnishing chamber, and
an ion beam source irradiating the burnishing tape with an ion beam, thereby removing contaminants adhering to the burnishing tape.
27 . An apparatus for manufacturing a magnetic recording disk, comprising;
a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited onto a substrate,
a lubricant-layer preparation chamber in which a lubricant layer is prepared onto the substrate after the magnetic film is deposited, and
a post-preparation treatment chamber in which a post-preparation treatment is carried out onto the substrate under a vacuum pressure, the post-preparation treatment being a step to coordinate adhesive strength and surface lubricity of the lubricant layer.
28 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 27 , further comprising a transfer system that transfers the substrate from the lubricant-layer preparation chamber to the post-preparation treatment chamber without exposing the substrate to the atmosphere.
29 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 27 , further comprising a heater heating the lubricant layer in the post-preparation chamber to coordinate adhesive strength and surface lubricity thereof.
30 . An apparatus for manufacturing a magnetic recording disk, as claimed in claim 27 , further comprising an ultraviolet lamp irradiating the lubricant layer in the post-preparation chamber to coordinate adhesive strength and surface lubricity thereof.