Electron microscope
View Patent ↗An object of the present invention is to prevent foreign bodies attracted by a magnetic field of an objective lens or an electric field of an electrode plate and adhered to a surface of the objective lens or electrode plate from dropping onto the surface of a sample and adhering there during observation of the sample. To achieve the above object, an electron microscope in which, when a sample to be measured is moved away from below an objective lens, an exciting current to the objective lens of a scanning electron microscope is turned off or excitation thereof is made weaker than before the sample to be measured being moved away, or an applied voltage to an acceleration cylinder for accelerating an electron beam is turned off or made lower than before the sample to be measured being moved away is proposed.
1. An electron microscope comprising an electron source,
an objective lens for focusing an electron beam emitted from the electron source, and
a control device for controlling an exciting current of said objective lens, wherein
said control device controls said exciting current so that the exciting current of said objective lens is turned off or excitation thereof is made weaker than during scanning of a sample to be measured when said sample to be measured by said electron beam is at least moved away from below said objective lens.
2. The electron microscope according to claim 1 , wherein
said control device exercises control to turn off the exciting current of said objective lens or to make excitation thereof weaker at each predetermined time and/or after a predetermined number of samples.
3. The electron microscope according to claim 1 , wherein
when a predetermined number of foreign bodies is detected, said control device exercises control to turn off the exciting current of said objective lens or to make excitation thereof weaker.
4. The electron microscope according to claim 1 , comprising a vacuum chamber in which a sample irradiated with said focused electron beam is arranged, a load lock chamber for preliminarily exhausting air from sample space when the sample is introduced into the vacuum chamber, and a gate valve arranged between the vacuum chamber and the load lock chamber, wherein said control device exercises control to turn off the exciting current of said objective lens or to make excitation thereof weaker simultaneously with opening of said gate valve.
5. The electron microscope according to claim 1 , comprising an acceleration cylinder for accelerating said electron beam when passing through said objective lens, wherein said control device exercises control so that a voltage applied to said acceleration cylinder is turned off or made lower than during scanning of said sample to be measured when the exciting current of said objective lens is turned off or excitation thereof is made weaker.
6. A sample measuring method of measuring a sample using an electron beam by scanning the electron beam focused on the sample by using an objective lens, wherein foreign bodies adhering to a portion of said objective lens are caused to drop by turning off an exciting current of said objective lens or excitation thereof is made weaker when said sample moves away from below said objective lens and below a portion of said objective lens where foreign bodies adhere when said objective lens is excited.