Polishing pad
An improved polishing pad for polishing semi-conductors and other planar substrates in the presence of a slurry which optionally may contain abrasive particles is disclosed. The polishing pad comprises a non-woven fibrous component, a portion which may optionally comprise bicomponent fibers, optionally embedded within a polymer matrix component.
1. A process of polishing a substrate using a polishing pad, comprising:
providing a pad formed from a two-component system, a first component comprising a non-woven fiber web of a basis weight of about 100-2500 g/m 2 and a second component comprising a polymer matrix component, said first component distributed in said polymer matrix component, wherein the non-woven fiber web comprises bicomponent fibers comprising two polymers contained within a single filament, and wherein said pad is characterized as having a Shore D hardness of between about 10 D to 70 D, said fiber web present at a level of about 10-90% (wt;
providing a substrate to be polished;
providing a slurry; and
polishing the substrate with the slurry using the pad.
2. The process of claim 1 , wherein the substrate comprises a semi-conductor wafer.
3. The process of claim 1 , wherein the substrate comprises metal.
4. The process of claim 1 , wherein said pad further includes a polymer which is soluble or swellable in said polishing slurry.
5. The process of claim 4 , wherein said soluble polymer, upon solubilizing in said slurry, provides a void in the pad.
6. The process of claim 1 , wherein the bicomponent fibers comprise a sheath/core configuration.
7. The polishing pad of claim 6 , wherein the bicomponent fibers are comprised of at least one of polyethylene, polyethylene terephthalate, polyester, polyamide, and polypropylene.
8. The process of claim 1 , wherein the bicomponent fibers comprise a side-by-side configuration.