A phase-change memory device includes a first insulator having a hole therethrough, a first electrode that conforms at least partially to the hole, a phase-change material in electrical communication with the first electrode, and a second electrode in electrical communication with the phase-change material. When current is passed from the first electrode to the second electrode through the phase-change material, at least one of the first and second electrodes remains unreactive with the phase change material.
1. A memory device comprising:
a phase-change material having an upper surface and a lower surface;
a first electrode disposed adjacent to and in electrical communication with the lower surface of the phase-change material;
a second electrode disposed adjacent to and in electrical communication with the upper surface of the phase-change material;
a first insulator having an upper surface, a lower surface and a hole therethrough, wherein the first electrode is arranged within the hole, wherein the first electrode includes a first, lower end and a second, upper end, wherein the first, lower end of the first electrode is arranged proximate the lower surface of the first insulator, wherein the second, upper end of the first electrode is arranged proximate the upper surface of the first insulator, wherein the second, upper end of the first electrode flares radially outwardly along a length of the first electrode from the first, lower end to the second, upper end and terminates to form a first contact region, wherein the first contact region includes
an arcuate shaped, upwardly-facing surface portion, and
a radially-outwardly facing, non-arcuate end surface portion, wherein each of the arcuate shaped, upwardly-facing surface portion and the radially-outwardly facing, non-arcuate end surface portion extend beyond the upper surface of the first insulator and are adjacently-arranged to and in direct contact with the lower surface of the phase-change material.
2. The memory device of claim 1 , wherein said first electrode lines said hole.
3. The memory device of claim 1 , wherein said second electrode contacts said phase-change material.
4. The memory device of claim 3 , wherein said second electrode and said phase-change material undergo no chemical or electrochemical reaction when current passes between said first electrode and said second electrode.
5. The memory device of claim 1 , where said first electrode and said phase-change material do not form an alloy when said current passes between said first electrode and said second electrode.
6. The memory device of claim 1 , wherein no electromigration of atomic constituents occurs between said first electrode and said phase-change material when current passes between said first electrode and said second electrode.
7. The memory device of claim 1 , further including
a second insulator including a first, lower end and a second, upper end, wherein the second insulator is formed over said first electrode, wherein the second insulator is disposed within the hole.
8. The memory device of claim 7 , wherein the second, upper end of the second insulator extends beyond the upper surface of the first insulator, wherein the second, upper end of the second insulator is recessed below and does not extend beyond the second, upper end of the first electrode.
9. The memory device of claim 7 , wherein the lower surface of the phase-change material contacts the second, upper end of the second insulator.
10. The memory device of claim 1 , wherein the second electrode includes an upper surface and a lower surface, wherein the lower surface of the second electrode includes an annular portion that forms a second contact region, wherein the annular portion further forms the lower surface of the second electrode to include recessed pocket, wherein the recessed pocket extends radially beyond the radially-outwardly facing, non-arcuate end surface portion of the first electrode, wherein the memory device further includes
a third insulator disposed within and substantially occupying all of the recessed pocket, wherein the third insulator and the annular portion of the lower surface of the second electrode results in the second contact region of the second electrode being laterally displaced from the first contact region of the first electrode.
11. The memory device of claim 10 , wherein the third insulator is formed over and disposed adjacent the upper surface of the phase-change material.
12. The memory device of claim 10 , wherein the third insulator and the annular portion of the lower surface of the second electrode provides
means for biasing current flow in compounded:
a vertically upward direction, and
a radially outward direction
from the first contact region, through the phase-change material and to the second contact region such that a phase-change programming region is formed between the first electrode and the second electrode but generally proximate to the first contact region.
13. The memory device of claim 1 , wherein said first electrode comprises carbon to provide
means for inhibiting the first electrode and the phase-change material from undergoing a chemical or electrochemical reaction when current passes between the first electrode and the second electrode.
14. The memory device of claim 13 , wherein said first electrode comprises carbon nanotubes.
15. The memory device of claim 13 , wherein said first electrode further comprises nitrogen.
16. The memory device of claim 1 , further comprising:
a spacer, wherein the spacer is disposed within the hole and is arranged to circumferentially wrap an outer side surface of the first electrode.
17. The memory device of claim 1 , wherein the lower surface of the phase-change material includes
a radially-inwardly facing surface portion, and
an arcuate-shaped, downwardly-facing portion, wherein the arcuate shaped, upwardly-facing surface portion of the first contact region of the first electrode is adjacently-arranged to and in direct contact with the arcuate-shaped, downwardly-facing portion of the phase-change material, wherein the radially-outwardly facing, non-arcuate end surface portion of the first contact region of the first electrode is adjacently-arranged to and in direct contact with the radially-inwardly facing surface portion of the phase-change material.
18. A method of making a memory device comprising:
providing a first insulator;
configuring a first hole through said first insulator;
providing a first conductive layer that conforms to the inner periphery of said hole;
configuring a portion of said first conductive layer to provide a first electrode, said first electrode being conformal to said periphery of said hole;
providing phase-change material over said first insulator and in electrical communication with said first electrode;
providing a second insulator over said phase-change material and over said hole;
configuring said second insulator to expose a portion of said phase-change material, said exposed portion of said phase-change material being laterally displaced from said inner periphery of said hole; and
providing a second conductive layer over said exposed portion of said phase-change material, said second conductive layer being in electrical communication with said phase-change layer, wherein the lower surface of the phase-change material includes
a radially-inwardly facing surface portion, and
an arcuate-shaped, downwardly-facing portion, wherein the arcuate shaped, upwardly-facing surface portion of a first contact region of the first electrode is adjacently-arranged to and in direct contact with the arcuate-shaped, downwardly-facing portion of the phase-change material, wherein a radially-outwardly facing, non-arcuate end surface portion of the first contact region of the first electrode is adjacently-arranged to and in direct contact with the radially-inwardly facing surface portion of the phase-change material.
19. A method of making a memory device comprising:
providing a first insulator;
configuring a first hole through said first insulator;
providing a first conductive layer that conforms to the inner periphery of said hole;
configuring a portion of said first conductive layer to provide a first electrode, said first electrode being conformal to said periphery of said hole, wherein the first electrode includes a first, lower end and a second, upper end, wherein the first, lower end of the first electrode is arranged proximate a lower surface of the first insulator, wherein the second, upper end of the first electrode is arranged proximate the upper surface of the first insulator, wherein the second, upper end of the first electrode flares radially outwardly along a length of the first electrode from the first, lower end to the second, upper end and terminates to form a first contact region, wherein the first contact region includes an arcuate shaped, upwardly-facing surface portion and a radially-outwardly facing, non-arcuate end surface portion, wherein each of the arcuate shaped, upwardly-facing surface portion and the radially-outwardly facing, non-arcuate end surface portion extend beyond the upper surface of the first insulator;
providing a phase-change material over said first insulator and in electrical communication with said first electrode, wherein each of the arcuate shaped, upwardly-facing surface portion and the radially-outwardly facing, non-arcuate end surface portion are adjacently-arranged to and in direct contact with a lower surface of the phase-change material;
providing a second insulator over said phase-change material and over said hole;
configuring said second insulator to expose a portion of said phase-change material, said exposed portion of said phase-change material being laterally displaced from said inner periphery of said hole; and
providing a second conductive layer over said exposed portion of said phase-change material, said second conductive layer being in electrical communication with said phase-change layer to form a second contact region.