Semiconductor device with ONO film
View Patent ↗A semiconductor device includes bit lines provided in a semiconductor substrate; an ONO film that is provided along the surface of the semiconductor substrate and is made of a tunnel oxide film, a trap layer, and a top oxide film; and an oxide film that is provided on the surface of the semiconductor substrate in the middle between the bit lines and contacts the side face of the ONO film, in which the film thickness of the oxide film is larger than the sum of the thicknesses of the tunnel oxide film and the top oxide film, and smaller than the thickness of the ONO film.
1. A semiconductor device comprising:
a semiconductor substrate;
a bit line provided in the semiconductor substrate;
an oxide-nitride-oxide (ONO) film that is provided along a surface of the semiconductor substrate, and includes a tunnel oxide film, a trap layer made of a nitride film, and a top oxide film; and
an oxide film, formed from the oxidation of the nitride film, that is provided on the surface of the semiconductor substrate in a middle portion between bit lines along the surface of the semiconductor substrate, and contacts a side face of the ONO film wherein said oxide film is formed to lie parallel to the surface of the semiconductor substrate between separated portions of the ONO film wherein each of the separated portions of the ONO film is formed above and covers the entire top surface of a bit line of said bit lines and extends beyond and overlaps each side surface of said bit line and partially extends into an area that separates said bit line from at least one other bit line of said bit lines wherein a charge storage portion of the ONO film is formed in a portion of the ONO film that lies in the area that separates the bit line from the at least one other bit line;
wherein the film thickness of the oxide film is larger than the sum of the thicknesses of the tunnel oxide film and the top oxide film, and smaller than the thickness of the ONO film.
2. The semiconductor device according to claim 1 , further comprising:
an insulating film that penetrates the ONO film on the bit line and has a film thickness larger than the thickness of the ONO film.
3. The semiconductor device according to claim 1 , further comprising:
a portion defining a groove that is provided in an area in the semiconductor substrate between the bit lines and contacts the bit lines,
wherein the ONO film is provided along an inner surface of the groove.
4. The semiconductor device according to claim 1 , wherein the film thickness of the oxide film is the same as the equivalent oxide-film thickness of the ONO film.
5. The semiconductor device according to claim 1 , further comprising:
a word line provided to contact the ONO film.