Apparatus and method for manufacturing high purity polycrystalline silicon
An apparatus for manufacturing high purity polycrystalline silicon comprises a vertical reactor, a vaporizer and a fusing evaporator for supplying gaseous silicon chloride and zinc, respectively. The fusing evaporator further comprises a zinc evaporator, a main vertical cylinder part connected to the upper part of the zinc evaporator, a solid trapping pipe inserted in the main vertical cylinder part, a zinc introducing pipe connected to the solid trapping pipe at an angle, a seal pot surrounding the lower portion of the solid trapping pipe, an induction heater surrounding the main vertical cylinder part, and a gas vent pipe connected to the side wall of the zinc evaporator.
1. An apparatus for manufacturing a high purity polycrystalline silicon, comprising:
a vaporizer of silicon chloride;
a fusing evaporator of zinc;
a vertical reactor provided with a heating means on the peripheral face thereof;
a silicon chloride gas supply nozzle disposed to connect the vaporizer of silicon chloride and the vertical reactor and for supplying a silicon chloride gas supplied from the vaporizer of silicon chloride into the vertical reactor;
a zinc gas supply nozzle disposed to connect the fusing evaporator of zinc and the vertical reactor and for supplying a zinc gas supplied from the fusing evaporator of zinc into the vertical reactor; and
an exhaust gas vent pipe connected to the vertical reactor,
the fusing evaporator of zinc, further comprising:
a zinc evaporator;
a main vertical cylinder part connected to the upper part of the zinc evaporator;
a solid trapping pipe inserted into the main vertical cylinder part;
a zinc introducing pipe connected to the solid trapping pipe at an angle;
a seal pot disposed to surround the lower end opening portion of the solid trapping pipe and for configuring the bottom face of solid trapping pipe;
an induction heater disposed on the peripheral face of the main vertical cylinder part and capable of controlling a temperature; and
a gas vent pipe connected to the side wall of the zinc evaporator.
2. The apparatus for manufacturing a high purity polycrystalline silicon as defined in claim 1 , wherein a reinforcement material is attached to the outside of the zinc evaporator.
3. The apparatus for manufacturing a high purity polycrystalline silicon as defined in claim 1 , wherein the seal pot is attached to the solid trapping pipe.
4. The apparatus for manufacturing a high purity polycrystalline silicon as defined in claim 1 , wherein a cut groove is formed at the upper opening end of the seal pot.
5. The apparatus for manufacturing a high purity polycrystalline silicon as defined in claim 1 , wherein an inert gas introduction pipe is connected to the solid trapping pipe and the main vertical cylinder part.