Dresser and apparatus for chemical mechanical polishing and method of dressing polishing pad
View Patent ↗A dresser adapted to a chemical mechanical polishing apparatus is used to perform dressing on a polishing pad for polishing a semiconductor wafer such that a circular-shaped support surface thereof is positioned opposite to and in contact with the polishing surface of the polishing pad. In the dresser, at least three polish retainers having band-like shapes are formed and elongated in radial directions from substantially the center of the support surface so as to form a plurality of sectorial regions. A plurality of parallel portions are formed in parallel with the polish retainer in each sectorial region. A plurality of band-shaped non-polish retainers are formed between the polish retainer and its parallel portion in each sectorial region. The dresser ensures adequate fuzziness of the polishing pad by way of dressing; hence, it is possible to maintain desired polishing performance of the polishing pad for a long time.
1. A dresser adapted to a chemical mechanical polishing apparatus so as to perform dressing on a polishing pad, comprising:
a support surface having a circular shape, which is positioned opposite to and in contact with the polishing pad;
at least three polish retainers having band-like shapes, which are formed on the support surface and which are elongated from substantially the center of the support surface in respective radial directions;
a plurality of parallel portions, which are formed in a sectorial region defined between two adjacent polish retainers and which are arranged in parallel with one of the two adjacent polish retainers; and
a plurality of non-polish retainers having band-like shapes, which are formed between one of the two adjacent polish retainers and the plurality of parallel portions.
2. The dresser adapted to a chemical mechanical polishing apparatus according to claim 1 , wherein the plurality of parallel portions are sequentially shortened in the lengths thereof in a departing direction from one of the two adjacent polish retainers.
3. The dresser adapted to a chemical mechanical polishing apparatus according to claim 2 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.
4. The dresser adapted to a chemical mechanical polishing apparatus according to claim 1 , wherein the two adjacent polish retainers are arranged with a predetermined angle therebetween on the support surface.
5. The dresser adapted to a chemical mechanical polishing apparatus according to claim 4 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.
6. The dresser adapted to a chemical mechanical polishing apparatus according to claim 4 , wherein the predetermined angle is in the range of 30° to 120°.
7. The dresser adapted to a chemical mechanical polishing apparatus according to claim 6 , wherein the predetermined angle is 45°.
8. The dresser adapted to a chemical mechanical polishing apparatus according to claim 1 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.
9. A chemical mechanical polishing apparatus including a dresser for dressing a polishing pad, said dresser including:
a support surface having a circular shape, which is positioned opposite to and in contact with the polishing pad;
at least three polish retainers having band-like shapes, which are formed on the support surface and which are elongated from substantially the center of the support surface in respective radial directions;
a plurality of parallel portions, which are formed in a sectorial region defined between two adjacent polish retainers and which are arranged in parallel with one of the two adjacent polish retainers; and
a plurality of non-polish retainers having band-like shapes, which are formed between one of the two adjacent polish retainers and the plurality of parallel portions.
10. A chemical mechanical polishing apparatus according to claim 9 , wherein the plurality of parallel portions are sequentially shortened in the lengths thereof in a departing direction from one of the two adjacent polish retainers.
11. A chemical mechanical polishing apparatus according to claim 10 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.
12. A chemical mechanical polishing apparatus according to claim 9 , wherein the two adjacent polish retainers are arranged with a predetermined angle therebetween on the support surface.
13. A chemical mechanical polishing apparatus according to claim 12 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.
14. A chemical mechanical polishing apparatus according to claim 9 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.
15. A method of dressing a polishing pad by use of a dresser adapted to a chemical mechanical polishing apparatus, the method comprising dressing a polishing pad with a dresser including:
a support surface having a circular shape, which is positioned opposite to and in contact with the polishing pad;
at least three polish retainers having band-like shapes, which are formed on the support surface and which are elongated from substantially the center of the support surface in respective radial directions;
a plurality of parallel portions, which are formed in a sectorial region defined between two adjacent polish retainers and which are arranged in parallel with one of the two adjacent polish retainers; and
a plurality of non-polish retainers having band-like shapes, which are formed between one of the two adjacent polish retainers and the plurality of parallel portions.
16. The method of dressing a polishing pad according to claim 15 , wherein the plurality of parallel portions are sequentially shortened in the lengths thereof in a departing direction from one of the two adjacent polish retainers.
17. The method of dressing a polishing pad according to claim 16 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.
18. The method of dressing a polishing pad according to claim 15 , wherein the two adjacent polish retainers are arranged with a predetermined angle therebetween on the support surface.
19. The method of dressing a polishing pad according to claim 18 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.
20. The method of dressing a polishing pad according to claim 15 , wherein the polish retainers and the parallel portions are each formed using a binder layer formed on the support surface and a plurality of polish particles retained in the binder layer.