IP Library Granted Patent US 8,237,080
Granted Patent B2
US 8,237,080 · App. 12/056,824 · Granted Aug 7, 2012

Method and apparatus for laser drilling holes with Gaussian pulses

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,237,080
App. No.
12/056,824
Granted
Aug 7, 2012
Kind
B2
Abstract

An improved method and apparatus for drilling tapered holes in workpieces with laser pulses is presented which uses defocused laser pulses to machine the holes with specified taper and surface finish while maintaining specified exit diameters and improved system throughput. A system is described which can also drill holes with the desired taper and surface finish without requiring defocused laser pulses.

Claims (11)

1. An improved method for forming a through hole in a workpiece, including the steps of producing a laser pulse with a laser, modifying said laser pulse with optics, and directing said laser pulse to impinge upon said workpiece, said through hole having a taper, a surface finish and an exit diameter, said workpiece including substantially homogeneous metallic material and having a top surface and an ablation threshold, said laser pulse having a spot size, a pulse duration and a peak power, the improvement comprising the further steps of:

producing, with said laser, said laser pulse, said laser pulse having said peak power at least about 20% greater than said ablation threshold of said workpiece and said pulse duration greater than 10 nanoseconds;

modifying, with said optics, said laser pulse to have said spot size having a 1/e 2 diameter at said top surface of said workpiece greater than about two times said exit diameter of said through hole; and

directing said at least one modified laser pulse to remove material from an intended volume of said workpiece thereby creating said through hole with said exit diameter, said surface finish and said taper.

2. The method of claim 1 where the 1/e 2 diameter of said spot size is between 2 and 5 times said exit diameter.

3. The method of claim 1 where the 1/e 2 diameter of said spot size is about 2.5 times said exit diameter.

4. The method of claim 1 where said peak power of said laser pulse is between about 20% greater than said ablation threshold and 100% greater than said ablation threshold.

5. The method of claim 1 where said peak power of said laser pulse is about 50% greater than said ablation threshold.

6. The method of claim 1 where said pulse duration of said laser pulse is between about 10 nanoseconds and one microsecond.

7. The method of claim 1 where said pulse duration of said laser pulse is between about 10 nanoseconds and 100 nanoseconds.

8. The method of claim 1 where said surface finish is substantially smooth.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO. 7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0227. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (TERM LOAN). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055006/0492 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0227 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2008
From: HOWERTON, JEFF; CHILDERS, DAVID; JOHANSEN, BRIAN; ALPAY, MEHMET EMIN
To: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 021369/0360 →