IP Library Patent Application 12058244
Patent Application
App. No. 12/058,244

INTEGRATED CONDUCTIVE SHIELD FOR MICROELECTRONIC DEVICE ASSEMBLIES AND ASSOCIATED METHODS

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Quick Facts
Patent No.
US None
App. No.
12/058,244
Abstract

Microelectronic device assemblies having integrated conductive shields are disclosed herein. The microelectronic device assemblies include a semiconductor substrate having a bond site and a solder ball electrically connected to the bond site, a dielectric sidewall at least partially encapsulating the semiconductor substrate, and a conductive shield in direct contact with the sidewall and in electrical communication with the solder ball and the bond site.

Claims (41)

1 . A microelectronic device assembly, comprising:

a semiconductor substrate having a bond site and a solder ball electrically connected to the bond site;

a dielectric sidewall at least partially encapsulating the semiconductor substrate; and

a conductive shield in direct contact with the sidewall and in electrical communication with the solder ball and the bond site.

2 . The microelectronic device assembly of claim 1 wherein the conductive shield includes a layer of conductive material plated onto the sidewall.

3 . The microelectronic device assembly of claim 1 , further comprising an objective lens attached to the semiconductor substrate, wherein the conductive shield includes a layer of conductive material plated onto the dielectric sidewall and side surfaces of the objective lens.

4 . The microelectronic device assembly of claim 3 wherein the conductive shield includes a first portion plated onto the objective lens and a second portion plated onto the sidewall, the first portion being transverse to the second portion.

5 . The microelectronic device assembly of claim 3 wherein the sidewall is a first sidewall, and wherein the microelectronic device assembly further includes a second sidewall encapsulating the first sidewall, and wherein the conductive shield includes a layer of conductive material between the first and second sidewalls.

6 . The microelectronic device assembly of claim 1 , further comprising an objective lens attached to the semiconductor substrate, wherein the sidewall at least partially encapsulates the semiconductor substrate and the objective lens, and wherein the conductive shield includes a layer of conductive material plated onto side surfaces of the sidewall.

7 . The microelectronic device assembly of claim 6 wherein the sidewall includes a first surface proximate to the objective lens and the semiconductor substrate and a second surface opposite the first surface, and wherein the layer of conductive material is plated onto the second surface.

8 . A microelectronic device assembly, comprising:

a semiconductor substrate carrying a bond site proximate to a first surface, a solder ball attached to a second surface opposite the first surface, and a via electrically connecting the bond site to the solder ball;

a dielectric sidewall at least partially encapsulating the semiconductor substrate;

a layer of conductive material in direct contact with the dielectric sidewall; and

a conductive interconnect extending between the bond site and the layer of conductive material through the dielectric sidewall.

9 . The microelectronic device assembly of claim 8 wherein the bond site is a first bond site, and wherein the semiconductor substrate includes a second bond site adjacent to the first bond site, and wherein the sidewall is interposed between the second bond site and the layer of conductive material.

10 . The microelectronic device assembly of claim 8 wherein the conductive interconnect is a stud bump extending through the dielectric sidewall from the bond site and in direct contact with the layer of conductive material.

11 . The microelectronic device assembly of claim 10 wherein the stud bump extends beyond the layer of conductive material.

12 . The microelectronic device assembly of claim 8 wherein the sidewall is a first dielectric sidewall, and wherein the imager assembly further includes a second dielectric sidewall encapsulating the layer of conductive material, the conductive interconnect, the first dielectric sidewall, and the semiconductor substrate.

13 . The microelectronic device assembly of claim 8 wherein the conductive interconnect includes a portion of a wirebond extending at least partially outwardly away from the objective lens and toward the layer of conductive material.

14 . The microelectronic device assembly of claim 13 wherein the portion of the wirebond includes a first end carried by the bond site and a second end opposite the first end, the second end being in direct contact with the layer of conductive material.

15 . The microelectronic device assembly of claim 13 wherein the wirebond includes a first end carried by the bond site and a second end opposite the first end, the second end being generally flush with a surface of the dielectric sidewall, and wherein the layer of conductive material is in direct contact with the surface of the sidewall and the second end of the wirebond.

16 . The microelectronic device assembly of claim 13 wherein the wirebond includes a first end carried by the bond site and a second end opposite the first end, the second end being exposed from the sidewall and in direct contact with the layer of conductive material.

17 . A process for forming a microelectronic device assembly, comprising:

forming a conductive interconnect on a bond site carried by a microelectronic device;

encapsulating the bond site and the conductive interconnect with a dielectric sidewall;

controlling an amount of the dielectric sidewall such that the conductive interconnect extends beyond the dielectric sidewall; and

depositing a layer of conductive material onto the conductive interconnect and the dielectric sidewall.

18 . The process of claim 17 wherein forming a conductive interconnect includes forming a stud bump on the bond site.

19 . The process of claim 17 wherein depositing a layer of conductive material includes directly contacting the conductive interconnect with the layer of conductive material.

20 . The process of claim 17 wherein controlling an amount of the dielectric sidewall includes controlling an amount of the dielectric sidewall such that a height of the conductive interconnect is not less than a height of the dielectric sidewall.

21 . The process of claim 17 wherein the dielectric sidewall is a first dielectric sidewall, and wherein the process further includes encapsulating the layer of conductive material, the conductive interconnect, the first dielectric sidewall, and the microelectronic device with a second dielectric sidewall.

22 . A process for forming a microelectronic device assembly, comprising:

forming a first microelectronic device adjacent to a second microelectronic device on a workpiece, the first microelectronic device having a first bond site and the second microelectronic device having a second bond site;

forming a conductive link between the first bond site and the second bond site;

encapsulating the first and second microelectronic devices and the conductive link with a dielectric sidewall;

severing the conductive link into a first conductive interconnect and a second conductive interconnect; and

depositing a layer of conductive material onto the dielectric sidewall such that the layer of conductive material is in direct contact with the first and second conductive interconnects.

23 . The process of claim 22 wherein forming a conductive link includes disposing a wirebond between the first and second bond sites.

24 . The process of claim 22 wherein severing the conductive link includes partially singulating the workpiece and removing a portion of the dielectric sidewall.

25 . The process of claim 22 wherein depositing a layer of conductive material includes coating the dielectric sidewall with a layer of copper, aluminum, or nickel with a thickness of about 1 micrometer to about 10 micrometers.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 23, 2014
From: APTINA IMAGING CORPORATION
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 034037/0711 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 10, 2009
From: MICRON TECHNOLOGY, INC.
To: APTINA IMAGING CORPORATION
Reel/Frame 023212/0656 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 28, 2008
From: VANAM, KIRAN KUMAR; WOOD, ALAN G.; DERDERIAN, JAMES M.; GOCHNOUR, DEREK J.; FAY, OWEN R.; ENGLAND, LUKE G.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 020721/0448 →