Light emitting device, method of manufacturing the same and monolithic light emitting diode array
View Patent ↗A light emitting device including: at least one light emitting stack including first and second conductivity type semiconductor layers and an active layer disposed there between, the light emitting stack having first and second surfaces and side surfaces interposed between the first and second surfaces; first and second contacts formed on the first and second surface of the light emitting stack, respectively; a first insulating layer formed on the second surface and the side surfaces of the light emitting stack; a conductive layer connected to the second contact and extended along one of the side surfaces of the light emitting stack to have an extension portion adjacent to the first surface; and a substrate structure formed to surround the side surfaces and the second surface of the light emitting stack.
1. A method of manufacturing a light emitting device, the method comprising:
forming at least one light emitting stack on a growth substrate to include first and second conductivity type semiconductor layers and an active layer therebetween,
wherein the light emitting stack has first and second surfaces defined by the first and second conductivity type semiconductor layers, respectively to oppose each other and side surfaces interposed therebetween;
forming a second contact on at least a portion of the second surface of the light emitting stack and then a first insulating layer on the second surface excluding the portion where the second contact is formed and the side surfaces of the light emitting stack;
forming a conductive layer connected to the second contact and extended along one of the side surfaces of the light emitting stack to a portion adjacent to the first surface;
forming a substrate structure to surround the side surfaces and the second surface of the light emitting stack;
separating the light emitting stack from the growth substrate to expose the portion of the conductive layer extended to the first surface; and
forming a first contact on the first surface of the light emitting stack to contact the first conductivity type semiconductor layer.
2. The method of claim 1 , wherein the substrate structure is formed of a conductive material, the method further comprising forming a second insulating layer on the side surfaces and the second surface of the light emitting stack, between the forming a conductive layer and the forming a substrate structure.
3. The method of claim 2 , wherein the forming a substrate structure is performed by plating.
4. The method of claim 1 , wherein the substrate structure is formed of an electrically insulating material.
5. The method of claim 1 , wherein the forming a second contact and then a first insulating layer comprises:
forming a first insulating layer on the second surface excluding a portion where the second contact is to be formed and the side surface of the light emitting stack; and
forming the second contact on the second surface where the first insulating layer is not formed.
6. The method of claim 1 , wherein the at least one light emitting stack comprises a plurality of light emitting stacks, and the forming at least one light emitting stack comprises:
forming the first conductivity type semiconductor layer, the active layer and the second conductivity type semiconductor layer sequentially on the growth substrate; and
mesa-etching the formed layers to obtain the plurality of light emitting stacks.
7. The method of claim 6 , wherein the first insulating layers are extended to portions between the plurality of light emitting stacks, respectively, and
wherein the method comprises removing the portions of the first insulating layers formed between the plurality of light emitting stacks.
8. The method of claim 6 , wherein the mesa-etching is performed to expose the growth substrate in the portions between the plurality of light emitting stacks.
9. The method of claim 8 , wherein the forming a conductive layer comprises forming the conductive layer connected to the second contact and extended along one of the side surfaces of each of the light emitting stacks to the exposed portions of the growth substrate.
10. The method of claim 6 , wherein the mesa-etching is performed such that the first conductive layer at least partially remains in the portions between the plurality of light emitting stacks.
11. The method of claim 10 , wherein the forming a conductive layer comprises forming the conductive layer connected to the second contact and extended along one of the side surfaces of each of the light emitting stacks to the remaining first conductivity type nitride semiconductor layer.
12. The method of claim 6 , further comprising forming at least one circuit layer to electrically connect the plurality of light emitting stacks to one another, after the forming a first contact.
13. The method of claim 12 , wherein the at least one circuit layer comprises a circuit layer connecting an exposed portion of the conductive layer of one of the light emitting stacks to the first contact of another light emitting stack.
14. The method of claim 12 , wherein the at least one circuit layer comprises an exposed portion of the conductive layer of one of the light emitting stacks to an exposed portion of the conductive layer of another light emitting stack.
15. The method of claim 12 , further comprising forming a third insulating layer on a portion of the first surface of the light emitting stack where the circuit layer is to be formed, before the forming a circuit layer.
16. The method of claim 12 , wherein the plurality of light emitting stacks are electrically connected to one another to be operable in response to an alternating current voltage.