Interconnects having sealing structures to enable selective metal capping layers
View Patent ↗Methods of fabricating a capped interconnect for a microelectronic device which includes a sealing feature for any gaps between a capping layer and an interconnect and structures formed therefrom. The sealing features improve encapsulation of the interconnect, which substantially reduces or prevents electromigration and/or diffusion of conductive material from the capped interconnect.
1. An apparatus comprising:
an interconnect including a conductive material extending into a dielectric layer;
a barrier layer located between the dielectric layer and the interconnect conductive material;
a capping material layer proximate said interconnect; and
a sealing structure adapted to seal an upper surface of exposed interconnect conductive material and an upper surface of exposed barrier layer between said capping material layer and said dielectric layer, wherein said sealing structure consists of sealing spacers abutting a substantially vertical sidewall of said capping material layer, the upper surface of exposed interconnect conductive material, and the upper surface of exposed barrier layer between said capping material layer and said dielectric layer, wherein said sealing structure comprises a sealing material layer that is different than the capping material layer.
2. The apparatus of claim 1 , wherein said sealing structure comprises an oxide layer formed in said interconnect proximate at least one gap exposing said interconnect.
3. The apparatus of claim 2 , wherein said oxide layer comprises an aluminum oxide layer.
4. The apparatus of claim 2 , wherein said oxide layer comprises a tin oxide layer.
5. The apparatus of claim 1 , wherein said sealing structure comprises a silicon nitride layer formed from a portion of said conductive material at said at least one gap.
6. The apparatus of claim 1 , wherein said interconnect including a conductive material comprises an interconnect including a copper-containing conductive material.
7. The apparatus of claim 1 , wherein said sealing spacers abut a substantially horizontal upper surface of said interconnect conductive material.
8. The apparatus of claim 7 , wherein an upper surface of said dielectric layer is substantially planar with said top surface of said interconnect conductive material.
9. The apparatus of claim 1 , wherein said sealing spacers abut a substantially horizontal upper surface of said barrier layer.