Method of forming p-type compound semiconductor layer
View Patent ↗A method of forming a p-type compound semiconductor layer includes increasing a temperature of a substrate loaded into a reaction chamber to a first temperature. A source gas of a Group III element, a source gas of a p-type impurity, and a source gas of nitrogen containing hydrogen are supplied into the reaction chamber to grow the p-type compound semiconductor layer. Then, the supply of the source gas of the Group III element and the source gas of the p-type impurity is stopped and the temperature of the substrate is lowered to a second temperature. The supply of the source gas of nitrogen containing hydrogen is stopped and drawn out at the second temperature, and the temperature of the substrate is lowered to room temperature using a cooling gas. Accordingly, hydrogen is prevented from bonding to the p-type impurity in the p-type compound semiconductor layer.
1. A method of forming a p-type compound semiconductor layer, the method comprising the steps of:
increasing a temperature of a substrate loaded into a reaction chamber to a first temperature;
supplying a source gas of a Group III element, a source gas of a p-type impurity and a source gas of nitrogen containing hydrogen into the reaction chamber so as to grow the p-type compound semiconductor layer;
after the growth of the p-type compound semiconductor layer is completed, stopping the supply of the source gas of the Group III element and the source gas of the p-type impurity and lowering the temperature of the substrate to a second temperature;
stopping the supply of the source gas of nitrogen containing hydrogen at the second temperature;
lowering the temperature of the substrate to a room temperature by supplying argon gas; and
before the step of stopping the supply of the source gas of nitrogen containing hydrogen at the second temperature, growing an ITO tunnel layer by supplying the source gas of the Group III element, a source gas of an n- or p-type impurity and the source gas of nitrogen containing hydrogen.
2. The method as claimed in claim 1 , further comprising the step of:
when the growth of the ITO tunnel layer is completed at the second temperature, maintaining the second temperature for a predetermined period of time.
3. The method as claimed in claim 1 , further comprising the step of:
when the growth of the ITO tunnel layer is completed at the second temperature, exhausting the source gas of nitrogen containing hydrogen remaining in the reaction chamber.
4. A method of forming a p-type compound semiconductor layer, the method comprising the steps of:
increasing a temperature of a substrate loaded into a reaction chamber to a first temperature;
supplying a source gas of a Group III element, a source gas of a p-type impurity and a source gas of nitrogen containing hydrogen into the reaction chamber so as to grow the p-type compound semiconductor layer;
after the growth of the p-type compound semiconductor layer is completed, stopping the supply of the source gas of the Group III element and the source gas of the p-type impurity and lowering the temperature of the substrate to a second temperature;
growing an ITO tunnel layer by supplying the source gas of the Group III element, a source gas of an n- or p-type impurity and the source gas of nitrogen containing hydrogen;
after the growth of the ITO tunnel layer is completed, stopping the supply of the source gas of the Group III element and the source gas of the n- or p-type impurity;
lowering the temperature of the substrate to a third temperature, and stopping the supply of the source gas of nitrogen containing hydrogen; and
lowering the temperature of the substrate to room temperature.
5. The method as claimed in claim 4 , wherein the second temperature is in a range of 400 to 900° C.
6. The method as claimed in claim 4 , wherein the third temperature is in a range of from 400 to 850° C.
7. The method as claimed in claim 4 , further comprising the step of:
after the step of stopping the supply of the source gas of nitrogen containing hydrogen at the third temperature, exhausting the source gas of nitrogen containing hydrogen remaining in the reaction chamber.