Method of forming buffer layer for nitride compound semiconductor light emitting device and nitride compound semiconductor light emitting device having the buffer layer
View Patent ↗A method of forming a buffer layer for a nitride compound semiconductor light emitting device includes placing a sapphire (Al 2 O 3 ) substrate in a reaction chamber; introducing a nitrogen source gas into a reaction chamber; and annealing the substrate in a state where the nitrogen source gas is introduced into the reaction chamber, to form an AIN compound layer on the substrate. The AIN compound layer having intermediate properties between those of the substrate and a semiconductor layer is formed between the substrate and the semiconductor layer. Thus, an interface space between the AIN compound layer and the buffer layer or the semiconductor layer that is to be formed on the AIN compound layer becomes smaller and a crystal stress also becomes smaller, thereby reducing a crack that may be generated due to differences in lattice constant and thermal expansion coefficient between the substrate and the semiconductor layer.
1. A method of forming a buffer layer for a nitride compound semiconductor light emitting device, the method comprising:
placing a sapphire (Al 2 O 3 ) substrate in a reaction chamber;
introducing a nitrogen source gas into the reaction chamber;
annealing the sapphire (Al 2 O 3 ) substrate in a state where the nitrogen source gas is introduced into the reaction chamber, to form an AIN compound layer directly on a surface of the sapphire substrate; and
forming a nitride compound buffer layer on the AIN compound layer,
wherein the nitrogen source gas is introduced into the reaction chamber at 1,000° C., and
wherein the nitride compound buffer layer is formed at a temperature of 400-800° C.
2. The method as claimed in claim 1 , wherein the nitride compound buffer layer is formed of In x Al y Ga 1-x-y N (0≦x,y,x+y≦1).
3. A nitride compound semiconductor light emitting device, fabricated by the method of claim 2 .
4. The method as claimed in claim 1 , wherein the AIN compound layer is formed through reaction of an Al in the sapphire (Al 2 O 3 ) substrate with a nitrogen in the nitrogen source gas.
5. A nitride compound semiconductor light emitting device, fabricated by the method of claim 4 .
6. A nitride compound semiconductor light emitting device, fabricated by the method of claim 1 .