Method for fabricating high-power light-emitting diode arrays
One embodiment of the present invention provides a method for fabricating a high-power light-emitting diode (LED). The method includes etching grooves on a growth substrate, thereby forming mesas on the growth substrate. The method further includes fabricating indium gallium aluminum nitride (InGaAlN)-based LED multilayer structures on the mesas on the growth substrate, wherein a respective mesa supports a separate LED structure. In addition, the method includes bonding the multilayer structures to a conductive substrate. The method also includes removing the growth substrate. Furthermore, the method includes depositing a passivation layer and an electrode layer above the InGaAlN multilayer structures, wherein the passivation layer covers the sidewalls and bottom of the grooves. Moreover, the method includes creating conductive paths which couple a predetermined number of adjacent individual LEDs, thereby allowing the LEDs to share a common power supply and be powered simultaneously to form a high-power LED array.
1. A semiconductor light-emitting device, comprising:
a number of LED devices supported by and coupled with a common conductive substrate, wherein each LED device includes an InGaAlN multilayer structure, and wherein the multilayer structure is bonded to the common conductive substrate via a metal bonding layer;
wherein each LED device is separated from one another by one or more grooves;
wherein each LED device comprises an electrode above its InGaAlN multilayer structure;
wherein the grooves are covered by a passivation layer; and
wherein at least one conductive path which couples the electrodes of two adjacent LED devices is created by depositing a layer of patterned metal on the passivation layer, thereby allowing the number of LED devices to share a common power supply and to emit light simultaneously to form a high-power LED array.
2. The device of claim 1 , wherein the width of the grooves is greater than 15 μm and less than 25 μm.
3. The device of claim 1 , wherein the width of the grooves is approximately 20 μm.
4. The device of claim 1 , wherein the width of the grooves is approximately the same for all grooves.
5. The device of claim 1 , wherein the widths of the grooves are different;
wherein the wide grooves demarcate the LED arrays; and
wherein the narrow grooves demarcate individual LEDs within an array.
6. The device of claim 1 , wherein the electrode comprises gold-germanium-nickel alloy.
7. The device of claim 1 , wherein the passivation layer comprises silicon dioxide.