Gallium nitride based compound semiconductor light-emitting device and method for manufacturing same
The present invention provides a gallium nitride based compound semiconductor light-emitting device having high light emission efficiency and a method of manufacturing the same. The gallium nitride based compound semiconductor light-emitting device includes: a substrate 11 ; an n-type semiconductor layer 13 , a light-emitting layer 14 , and a p-type semiconductor layer 15 that are composed of gallium nitride based compound semiconductors and formed on the substrate 11 in this order; a transparent positive electrode 16 that is formed on the p-type semiconductor layer 15 ; a positive electrode bonding pad 17 that is formed on the transparent positive electrode 16 ; a negative electrode bonding pad 18 that is formed on the n-type semiconductor layer 13 ; and an uneven surface that has random convex portions formed thereon and is provided on at least a portion of the surface 16 a of the transparent positive electrode 16.
1. A method of manufacturing a gallium nitride based compound semiconductor light-emitting device, the method comprising:
(1) a process of sequentially forming on a substrate an n-type semiconductor layer, a light-emitting layer, and a p-type semiconductor layer, and a transparent positive electrode, the n-type semiconductor layer, the light-emitting layer, and the p-type semiconductor layer each composed of a gallium nitride based compound semiconductor;
(2) a process of forming a mask made of metal particles on the surface of the transparent positive electrode; and
(3) a process of performing dry etching on the transparent positive electrode using the mask,
wherein the metal particles of the mask are made of Ni, or a Ni alloy.
2. The method of manufacturing a gallium nitride based compound semiconductor light-emitting device according to claim 1 ,
wherein the process ( 2 ) includes:
forming a metal thin film on the surface of the transparent positive electrode; and
performing a heat treatment.
3. The method of manufacturing a gallium nitride based compound semiconductor light-emitting device according to claim 1 ,
wherein an uneven surface is formed on at least a portion of the surface of the transparent positive electrode by wet etching.
4. A lamp comprising the gallium nitride based compound semiconductor light-emitting device manufactured by the method according to claim 1 .